Initial reaction of hafnium oxide deposited by remote plasma atomic layer deposition method
2003 ◽
Vol 42
(Part 2, No. 4B)
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pp. L414-L416
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Keyword(s):
Keyword(s):
2007 ◽
Vol 46
(No. 8)
◽
pp. L173-L176
◽
2007 ◽
pp. 359-362
2009 ◽
Vol 5
(2)
◽
pp. 83-86
◽
Keyword(s):
2021 ◽
Vol 224
◽
pp. 111010
◽