HfO2 Thin Film Deposited by Remote Plasma Atomic Layer Deposition Method

2006 ◽  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Method ◽  
Remote Plasma ◽  
Layer Deposition ◽  
Atomic Layer Deposition Method

Vertical Channel ZnO Thin-Film Transistors Using an Atomic Layer Deposition Method

2014 ◽  
Vol 35 (3) ◽  
pp. 360-362 ◽  
Author(s):  
Chi-Sun Hwang ◽  
Sang-Hee Ko Park ◽  
Himchan Oh ◽  
Min-Ki Ryu ◽  
Kyoung-Ik Cho ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Vertical Channel ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Deposition Method ◽  
Layer Deposition ◽  
Atomic Layer Deposition Method
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