Effects of dielectric charging on fundamental forces and reliability in capacitive microelectromechanical systems radio frequency switch contacts
2003 ◽
Vol 2
(3)
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pp. 169
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Keyword(s):
2020 ◽
Vol 31
(2)
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pp. 025003
2004 ◽
Vol 151
(2)
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pp. 93-103
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