Micro-electro-mechanical radio-frequency switch fixed electrode by wet etching of AlSi-based multilayer

2012 ◽  
Vol 520 (7) ◽  
pp. 3084-3090
Author(s):  
M. Tuohiniemi
2020 ◽  
Vol 8 (6) ◽  
pp. 852
Author(s):  
Yiwei Xie ◽  
Leimeng Zhuang ◽  
Pengcheng Jiao ◽  
Daoxin Dai

2007 ◽  
Vol 102 (2) ◽  
pp. 024903 ◽  
Author(s):  
Steven T. Patton ◽  
Kalathil C. Eapen ◽  
Jeffrey S. Zabinski ◽  
Jeffrey H. Sanders ◽  
Andrey A. Voevodin

2014 ◽  
Vol 1038 ◽  
pp. 57-60 ◽  
Author(s):  
K. Cheval ◽  
J. Coulm ◽  
S. Gout ◽  
Y. Layouni ◽  
P. Lombard ◽  
...  

The aim of this paper is to report on the use of Microcontact Printing (μCP) for the manufacturing of 3D Molded Interconnects Devices. Two different approaches are reported. A first one is based on the total metallization of the polymer, μCP of the 3D pattern followed by the wet etching of the non-protected areas of the part (the so-called indirect process). A second approach is based on the combination of radio-frequency (RF) plasma treatment, μCP of a pattern of catalysts on the polymer and metallization by electroless deposition (the so-called direct process). This second process allows metallization of bare polymer parts (free of catalytic species in the bulk) with conductive 3D networks ready for the assembly of SMD devices. Examples of MID devices made with both approaches are reported. Key points like thickness (up to 12-15 μm), conductivity and adhesion of the metallic network are also reviewed. Printing on slope surfaces is demonstrated. Advantages and drawbacks of both processes are discussed.


RSC Advances ◽  
2020 ◽  
Vol 10 (16) ◽  
pp. 9672-9677
Author(s):  
Chengzhang Han ◽  
Haoran Ma ◽  
Yanping Wang ◽  
Jing Liu ◽  
Lihua Teng ◽  
...  

In this report, a solidly mounted resonator (SMR), consisting of an Au electrode, Mg-doped ZnO (MgXZn1−XO) piezoelectric film and Bragg acoustic reflector, was fabricated on a Si substrate by radio frequency (RF) magnetron sputtering.


2014 ◽  
Vol 50 (13) ◽  
pp. 956-957 ◽  
Author(s):  
Yingjun Yuan ◽  
Zhitao Huang ◽  
Xiang Wang

Sign in / Sign up

Export Citation Format

Share Document