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Combined electron and focused ion beam system for improvement of secondary ion yield in secondary ion mass spectrometry instrument
Applied Physics Letters
◽
10.1063/1.2362996
◽
2006
◽
Vol 89
(16)
◽
pp. 164103
◽
Cited By ~ 1
Author(s):
L. Ji
◽
Q. Ji
◽
K.-N. Leung
◽
R. A. Gough
Keyword(s):
Mass Spectrometry
◽
Focused Ion Beam
◽
Secondary Ion Mass Spectrometry
◽
Ion Beam
◽
Mass Spectrometry Instrument
◽
Beam System
◽
Ion Mass Spectrometry
◽
Secondary Ion
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References
A New Focused Ion Beam Optical System for a Time-of-flight-Secondary Ion Mass Spectrometry Instrument
Rapid Communications in Mass Spectrometry
◽
10.1002/(sici)1097-0231(19970131)11:2<175::aid-rcm725>3.0.co;2-k
◽
1997
◽
Vol 11
(2)
◽
pp. 175-178
◽
Cited By ~ 4
Author(s):
H. Shichi
◽
S. Osabe
◽
K. Kanehori
Keyword(s):
Mass Spectrometry
◽
Optical System
◽
Focused Ion Beam
◽
Secondary Ion Mass Spectrometry
◽
Ion Beam
◽
Time Of Flight
◽
Mass Spectrometry Instrument
◽
Ion Mass Spectrometry
◽
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Comparison of the Spectra of LiCoO2, CoO, and Co3O4 by Time-of-Flight Secondary Ion Mass Spectrometry with Focused Ion Beam (FIB-TOF-SIMS)
Journal of the Vacuum Society of Japan
◽
10.3131/jvsj2.56.122
◽
2013
◽
Vol 56
(4)
◽
pp. 122-124
◽
Cited By ~ 2
Author(s):
Miwa OHNISHI
◽
Osamu MATSUOKA
◽
Hidenobu NOGI
◽
Tetsuo SAKAMOTO
Keyword(s):
Mass Spectrometry
◽
Focused Ion Beam
◽
Secondary Ion Mass Spectrometry
◽
Ion Beam
◽
Time Of Flight
◽
Tof Sims
◽
Ion Mass Spectrometry
◽
Secondary Ion
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A C60Primary Ion Beam System for Time of Flight Secondary Ion Mass Spectrometry: Its Development and Secondary Ion Yield Characteristics
Analytical Chemistry
◽
10.1021/ac026338o
◽
2003
◽
Vol 75
(7)
◽
pp. 1754-1764
◽
Cited By ~ 420
Author(s):
Daniel Weibel
◽
Steve Wong
◽
Nicholas Lockyer
◽
Paul Blenkinsopp
◽
Rowland Hill
◽
...
Keyword(s):
Mass Spectrometry
◽
Secondary Ion Mass Spectrometry
◽
Ion Beam
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Time Of Flight
◽
Beam System
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Ion Mass Spectrometry
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Secondary Ion
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Combined Secondary Ion Mass Spectrometry Depth Profiling and Focused Ion Beam Analysis of Cu Films Electrodeposited under Oscillatory Conditions
ChemElectroChem
◽
10.1002/celc.201402427
◽
2015
◽
Vol 2
(5)
◽
pp. 664-671
◽
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Author(s):
Nguyen T. M. Hai
◽
David Lechner
◽
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◽
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◽
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Focused Ion Beam
◽
Secondary Ion Mass Spectrometry
◽
Ion Beam
◽
Depth Profiling
◽
Ion Beam Analysis
◽
Cu Films
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Beam Analysis
◽
Ion Mass Spectrometry
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Secondary ion mass spectrometry depth profiling of nanometer-scale p+-n junctions fabricated by Ga+ focused ion beam implantation
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.586355
◽
1992
◽
Vol 10
(1)
◽
pp. 333
◽
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Author(s):
Steven W. Novak
Keyword(s):
Mass Spectrometry
◽
Focused Ion Beam
◽
Secondary Ion Mass Spectrometry
◽
Ion Beam
◽
Depth Profiling
◽
Nanometer Scale
◽
Ion Beam Implantation
◽
Ion Mass Spectrometry
◽
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Behavior of Gallium Secondary Ion Intensity in Gallium Focused Ion Beam Secondary Ion Mass Spectrometry
Japanese Journal of Applied Physics
◽
10.1143/jjap.36.1287
◽
1997
◽
Vol 36
(Part 1, No. 3A)
◽
pp. 1287-1291
◽
Cited By ~ 5
Author(s):
Tetsuo Sakamoto
◽
Masanori Owari
◽
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Keyword(s):
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◽
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◽
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Charge neutralization using secondary electron shower for shave-off depth profiling by focused ion beam secondary ion mass spectrometry
Applied Surface Science
◽
10.1016/j.apsusc.2008.05.103
◽
2008
◽
Vol 255
(4)
◽
pp. 1351-1353
Author(s):
Y. Ishizaki
◽
T. Yamamoto
◽
M. Fujii
◽
M. Owari
◽
M. Nojima
◽
...
Keyword(s):
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◽
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◽
Focused Ion Beam
◽
Secondary Ion Mass Spectrometry
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◽
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Focused ion beam-secondary ion mass spectrometry analyses of nanostructured thin films
Surface and Coatings Technology
◽
10.1016/j.surfcoat.2003.10.079
◽
2004
◽
Vol 180-181
◽
pp. 323-330
◽
Cited By ~ 6
Author(s):
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◽
C.E. Bottani
◽
P.M. Ossi
◽
R. Levi-Setti
Keyword(s):
Mass Spectrometry
◽
Thin Films
◽
Focused Ion Beam
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Secondary Ion Mass Spectrometry
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◽
Nanostructured Thin Films
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Ion Mass Spectrometry
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Combined focused ion beam and secondary ion mass spectrometry for high resolution light element detection applied on Li-Ion batteries
Microscopy and Microanalysis
◽
10.1017/s1431927621003822
◽
2021
◽
Vol 27
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◽
pp. 1012-1015
Author(s):
Gudrun Wilhelm
◽
Ute Golla-Schindler
◽
Katharina Wöhrl
◽
Christian Geisbauer
◽
Graham Cooke
◽
...
Keyword(s):
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◽
High Resolution
◽
Focused Ion Beam
◽
Secondary Ion Mass Spectrometry
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Ion Beam
◽
Light Element
◽
Li Ion Batteries
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Practical Aspects of Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometry Analysis Enhanced by Fluorine Gas Coinjection
Chemistry of Materials
◽
10.1021/acs.chemmater.1c00052
◽
2021
◽
Author(s):
Krzysztof Wieczerzak
◽
Agnieszka Priebe
◽
Ivo Utke
◽
Johann Michler
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Focused Ion Beam
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Secondary Ion Mass Spectrometry
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Mass Spectrometry Analysis
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Spectrometry Analysis
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