A novel method to determine electron density by optical emission spectroscopy in low-pressure nitrogen plasmas

2006 ◽  
Vol 13 (12) ◽  
pp. 123501 ◽  
Author(s):  
Xi-Ming Zhu ◽  
Yu-Dong Pu ◽  
Zhi-Gang Guo ◽  
Yi-Kang Pu
Keyword(s):  
Electron Density ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Low Pressure ◽  
Novel Method ◽  
Nitrogen Plasmas

scholarly journals Machine Learning Prediction of Electron Density and Temperature from Optical Emission Spectroscopy in Nitrogen Plasma

Coatings ◽  
2021 ◽  
Vol 11 (10) ◽  
pp. 1221
Author(s):  
Jun-Hyoung Park ◽  
Ji-Ho Cho ◽  
Jung-Sik Yoon ◽  
Jung-Ho Song
Keyword(s):  
Machine Learning ◽  
Electron Temperature ◽  
Real Time ◽  
Electron Density ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Plasma Parameters ◽  
Plasma Nitridation

We present a non-invasive approach for monitoring plasma parameters such as the electron temperature and density inside a radio-frequency (RF) plasma nitridation device using optical emission spectroscopy (OES) in conjunction with multivariate data analysis. Instead of relying on a theoretical model of the plasma emission to extract plasma parameters from the OES, an empirical correlation was established on the basis of simultaneous OES and other diagnostics. Additionally, we developed a machine learning (ML)-based virtual metrology model for real-time Te and ne monitoring in plasma nitridation processes using an in situ OES sensor. The results showed that the prediction accuracy of electron density was 97% and that of electron temperature was 90%. This method is especially useful in plasma processing because it provides in-situ and real-time analysis without disturbing the plasma or interfering with the process.

Gas temperature and electron density profiles in an argon dc microdischarge measured by optical emission spectroscopy

2010 ◽  
Vol 107 (5) ◽  
pp. 053305 ◽  
Author(s):  
Sergey G. Belostotskiy ◽  
Tola Ouk ◽  
Vincent M. Donnelly ◽  
Demetre J. Economou ◽  
Nader Sadeghi
Keyword(s):  
Electron Density ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Gas Temperature ◽  
Density Profiles ◽  
Electron Density Profiles

Characterization of a low-pressure argon plasma using optical emission spectroscopy and a global model

2007 ◽  
Vol 101 (5) ◽  
pp. 053306 ◽  
Author(s):  
A. Palmero ◽  
E. D. van Hattum ◽  
H. Rudolph ◽  
F. H. P. M. Habraken
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Argon Plasma ◽  
Optical Emission ◽  
Low Pressure ◽  
Global Model
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