Plasma Immersion Ion Implantation with a 4kV/10kHz Compact High Voltage Pulser

2006 ◽  
Author(s):  
M. Ueda ◽  
R. M. Oliveira ◽  
J. O. Rossi ◽  
H. Reuther ◽  
G. Silva
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
High Voltage Pulser ◽  
Plasma Immersion Ion Implantation

High voltage pulser with a fast fall-time for plasma immersion ion implantation

2011 ◽  
Vol 82 (4) ◽  
pp. 045102 ◽  
Author(s):  
Zongtao Zhu ◽  
Chunzhi Gong ◽  
Xiubo Tian ◽  
Shiqin Yang ◽  
Ricky K. Y. Fu ◽  
...  
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
Fall Time ◽  
High Voltage Pulser ◽  
Plasma Immersion Ion Implantation

Hybrid elevated-temperature, low/high-voltage plasma immersion ion implantation of AISI304 stainless steel

2001 ◽  
Vol 135 (2-3) ◽  
pp. 178-183 ◽  
Author(s):  
X.B. Tian ◽  
Y.X. Leng ◽  
T.K. Kwok ◽  
L.P. Wang ◽  
B.Y. Tang ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Elevated Temperature ◽  
Ion Implantation ◽  
High Voltage ◽  
Plasma Immersion Ion Implantation

A high voltage pulse power supply for metal plasma immersion ion implantation and deposition

2010 ◽  
Vol 81 (12) ◽  
pp. 124703 ◽  
Author(s):  
M. C. Salvadori ◽  
F. S. Teixeira ◽  
W. W. R. Araújo ◽  
L. G. Sgubin ◽  
N. S. Sochugov ◽  
...  
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
Power Supply ◽  
Voltage Pulse ◽  
High Voltage Pulse ◽  
Pulse Power ◽  
Pulse Power Supply ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation
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