Spring constant calibration of atomic force microscopy cantilevers with a piezosensor transfer standard

2007 ◽  
Vol 78 (9) ◽  
pp. 093705 ◽  
Author(s):  
E. D. Langlois ◽  
G. A. Shaw ◽  
J. A. Kramar ◽  
J. R. Pratt ◽  
D. C. Hurley
Author(s):  
Peter J. Cumpson ◽  
Charles A. Clifford ◽  
Jose F. Portoles ◽  
James E. Johnstone ◽  
Martin Munz

2005 ◽  
Vol 77 (4) ◽  
pp. 1192-1195 ◽  
Author(s):  
Mark A. Poggi ◽  
Andrew W. McFarland ◽  
Jonathan S. Colton ◽  
Lawrence A. Bottomley

1987 ◽  
Vol 111 ◽  
Author(s):  
P. J. Bryant ◽  
R. Yang ◽  
R. Miller

AbstractThe applicability of atomic force microscopy (AFM) to both conductive and dielectric materials is the subject of this study. A representative conductor, Cu, and two dielectrics, mica and selenite, were examined. Microstructure and single lamellar steps were resolved. Surface areas on Cu and mica generated reproducible images when scanned repeatedly. There was no evidence of damage to the probe or the sample as a result of the AFM investigations. Selenite did show evidence of change after repeated scans with an AFM lever of 12 N/m spring constant exerting a 10−6N force.


ACTA IMEKO ◽  
2020 ◽  
Vol 9 (5) ◽  
pp. 129
Author(s):  
J. Jiang ◽  
H. Zhou ◽  
Y. Zhang ◽  
S. Wu ◽  
Z. Zhang ◽  
...  

This paper describes stiffness measurement of cantilever transfer standards used for Atomic Force Microscopy (AFM) tip calibration based on electromagnetic compensation. The transfer standard of cantilever is designed and manufactured based on the bulk fabrication of SOI wafers. The measure range of the transfer standard covers from 0.04 N/m to 16 N/m. The series of transfer standard is designed for the calibration test of the cantilever used in AFM, along with the test apparatus specifically designed. The relative uncertainty of the stiffness is smaller than 2.4 % (<em>k</em> = 2).


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