Performance test of cantilever transfer standard used for afm tip calibration based on electromagnetic compensation

This paper describes stiffness measurement of cantilever transfer standards used for Atomic Force Microscopy (AFM) tip calibration based on electromagnetic compensation. The transfer standard of cantilever is designed and manufactured based on the bulk fabrication of SOI wafers. The measure range of the transfer standard covers from 0.04 N/m to 16 N/m. The series of transfer standard is designed for the calibration test of the cantilever used in AFM, along with the test apparatus specifically designed. The relative uncertainty of the stiffness is smaller than 2.4 % (<em>k</em> = 2).