Effects of substrate bias on the preferred orientation, phase transition and mechanical properties for NbN films grown by direct current reactive magnetron sputtering

2008 ◽  
Vol 104 (2) ◽  
pp. 023527 ◽  
Author(s):  
M. Wen ◽  
C. Q. Hu ◽  
C. Wang ◽  
T. An ◽  
Y. D. Su ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Phase Transition ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Preferred Orientation ◽  
Reactive Magnetron Sputtering ◽  
Substrate Bias ◽  
Reactive Magnetron

Microstructural and Mechanical Properties of TiAlN and Ti3AlN Films Deposited by Reactive Magnetron Sputtering

2015 ◽  
Vol 816 ◽  
pp. 283-288 ◽  
Author(s):  
Hao Huang ◽  
Zhen Xi Li ◽  
Min Juan Wang ◽  
Chuan Xie
Keyword(s):  
Mechanical Properties ◽  
Residual Stress ◽  
Magnetron Sputtering ◽  
Compressive Stress ◽  
Solid Solubility ◽  
Single Phase ◽  
Reactive Magnetron Sputtering ◽  
Substrate Bias ◽  
Reactive Magnetron ◽  
High Substrate

Two series of TiAlN and Ti3AlN films have been deposited on Si (100) substrates by reactive magnetron sputtering TiAl and Ti3Al targets in Ar/N2 mixture. The effects of incoming ions energies controlled by Vb on the microstructure, morphologies, residual stress and hardness have been explored by XRD, SEM, AFM, surface profiler and nanoindentation. The results showed that single phase cubic Ti-Al-N solid solubility formed by Al atoms replacing some Ti atoms in the cubic TiN lattice occured in both TiAlN and Ti3AlN films. As substrate bias increased, the preferred orientation firstly changed from (111) to (200), and then returned to (111) at higher substrate bias. At the same time, high substrate bias promoted the densification of films and presence of high compressive stress, which is benefit for improvement of hardness.

Relationship between CH4/Ar Ratio, Stoichiometry, and Mechanical Properties of TaCx Coatings Produced by Reactive Magnetron Sputtering

2021 ◽  
pp. 149879
Author(s):  
K.P. Valdez ◽  
H.A. Castillo ◽  
Leonel Cota ◽  
J.H. Quintero-Orozco ◽  
E. Restrepo-Parra ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Microstructure and mechanical properties of W-C:H coatings deposited by pulsed reactive magnetron sputtering

2011 ◽  
Vol 205 (19) ◽  
pp. 4471-4479 ◽  
Author(s):  
Andrzej Czyżniewski ◽  
Witold Gulbiński ◽  
György Radnóczi ◽  
Marianna Szerencsi ◽  
Mieczysław Pancielejko
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Microstructure And Mechanical Properties

scholarly journals Structural and Mechanical Properties of Zr-Si-N Thin Films Prepared by Reactive Magnetron Sputtering

2015 ◽  
Vol 18 (suppl 2) ◽  
pp. 30-34 ◽  
Author(s):  
Flávio Gustavo Ribeiro Freitas ◽  
Roberto Hübler ◽  
Gabriel Soares ◽  
Amanda Gardênia Santos Conceição ◽  
Edson Reis Vitória ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Effect of nitrogen content on structural and mechanical properties of AlTiZrTaHf(-N) high entropy films deposited by reactive magnetron sputtering

2022 ◽  
pp. 128051
Author(s):  
Mohamed El Garah ◽  
Djallel Eddine Touaibia ◽  
Sofiane Achache ◽  
Alexandre Michau ◽  
Elizaveta Sviridova ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Nitrogen Content ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
High Entropy
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