Dopant Activation and Defect Analysis of Ultra-Shallow Junctions Made by Gas Cluster Ion Beams

2008 ◽  
Author(s):  
Yan Shao ◽  
John Hautala ◽  
Larry Larson ◽  
Amitabh Jain ◽  
Edmund G. Seebauer ◽  
...  
Keyword(s):  
Ion Beams ◽  
Defect Analysis ◽  
Dopant Activation ◽  
Shallow Junctions ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Ultra Shallow Junctions

Cu pattern etching by oxygen gas cluster ion beams with acetic acid vapor

2014 ◽  
Author(s):  
N. Toyoda ◽  
M. Kojima ◽  
R. Hinoura ◽  
A. Yamaguchi ◽  
K. Hara ◽  
...  
Keyword(s):  
Acetic Acid ◽  
Ion Beams ◽  
Acid Vapor ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Oxygen Gas

Morphology dependence of surface smoothing of Ar gas cluster ion beams

2005 ◽  
pp. 241-244
Author(s):  
S. Houzumi ◽  
T. Mashita ◽  
N. Toyoda ◽  
K. Mochiji ◽  
T. Mitamura ◽  
...  
Keyword(s):  
Ion Beams ◽  
Surface Smoothing ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Ar Gas

Surface modifications by gas cluster ion beams

1996 ◽  
pp. 165-169
Author(s):  
I. Yamada ◽  
J. Matsuo ◽  
Z. Insepov ◽  
M. Akizuki
Keyword(s):  
Surface Modifications ◽  
Ion Beams ◽  
Cluster Ion Beams ◽  
Cluster Ion

Sputtering Yields for Gold Using Argon Gas Cluster Ion Beams

2012 ◽  
Vol 116 (44) ◽  
pp. 23735-23741 ◽  
Author(s):  
Li Yang ◽  
Martin P. Seah ◽  
Ian S. Gilmore
Keyword(s):  
Ion Beams ◽  
Argon Gas ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Sputtering Yields
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