Raman scattering measurement of the free‐carrier concentration and of the impurity location in boron‐implanted silicon
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1991 ◽
Vol 50
(1-4)
◽
pp. 295-299
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1986 ◽
Vol 25
(Part 1, No. 4)
◽
pp. 652-653
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2007 ◽
Vol 24
(8)
◽
pp. 2245-2248
◽
1999 ◽
Vol 103
(25)
◽
pp. 5280-5288
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