Mechanism for stress‐induced leakage currents in thin silicon dioxide films

1995 ◽  
Vol 78 (6) ◽  
pp. 3883-3894 ◽  
Author(s):  
D. J. DiMaria ◽  
E. Cartier
Keyword(s):  
Silicon Dioxide ◽  
Leakage Currents ◽  
Silicon Dioxide Films ◽  
Thin Silicon

Annealing of Fowler-Nordheim Stress-Induced Leakage Currents in Thin Silicon Dioxide Films

2000 ◽  
Vol 147 (12) ◽  
pp. 4676
Author(s):  
C. H. Ang ◽  
C. H. Ling ◽  
Z. Y. Cheng ◽  
S. J. Kim ◽  
B. J. Cho
Keyword(s):  
Silicon Dioxide ◽  
Leakage Currents ◽  
Silicon Dioxide Films ◽  
Thin Silicon

Measurements and Modelling of Thin Silicon Dioxide Films on Silicon

1989 ◽  
Author(s):  
A. Kalnitsky ◽  
S. P. Tay ◽  
J. P. Ellul ◽  
J. W. Andrews ◽  
E. A. Irene ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thin Silicon

Hydrides and Hydroxyls in Thin Silicon Dioxide Films

1971 ◽  
Vol 118 (4) ◽  
pp. 614 ◽  
Author(s):  
K. H. Beckmann ◽  
N. J. Harrick
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thin Silicon

ChemInform Abstract: THE GROWTH AND CHARACTERIZATION OF VERY THIN SILICON DIOXIDE FILMS

1980 ◽  
Vol 11 (51) ◽  
Author(s):  
A. C. ADAMS ◽  
T. E. SMITH ◽  
C. C. CHANG
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thin Silicon
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