Physical Origin of Stress-Induced Leakage Currents in Ultra-Thin Silicon Dioxide Films

IEICE Transactions on Electronics ◽

10.1093/ietele/e90-c.5.955 ◽

2007 ◽

Vol E90-C (5) ◽

pp. 955-961 ◽

Author(s):

T. ENDOH ◽

K. HIROSE ◽

K. SHIRAISHI

Keyword(s):

Silicon Dioxide ◽

Physical Origin ◽

Leakage Currents ◽

Silicon Dioxide Films ◽

Download Full-text

Mechanism for stress‐induced leakage currents in thin silicon dioxide films

Journal of Applied Physics ◽

10.1063/1.359905 ◽

1995 ◽

Vol 78 (6) ◽

pp. 3883-3894 ◽

Author(s):

D. J. DiMaria ◽

E. Cartier

Keyword(s):

Silicon Dioxide ◽

Leakage Currents ◽

Silicon Dioxide Films ◽

Download Full-text

Annealing of Fowler-Nordheim Stress-Induced Leakage Currents in Thin Silicon Dioxide Films

Journal of The Electrochemical Society ◽

10.1149/1.1394122 ◽

2000 ◽

Vol 147 (12) ◽

pp. 4676

Author(s):

C. H. Ang ◽

C. H. Ling ◽

Z. Y. Cheng ◽

S. J. Kim ◽

B. J. Cho

Keyword(s):

Silicon Dioxide ◽

Leakage Currents ◽

Silicon Dioxide Films ◽

Download Full-text

A quantitative analysis of stress-induced leakage currents in ultra-thin silicon dioxide films

2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) ◽

10.1109/icsict.2001.982054 ◽

2005 ◽

Author(s):

T. Endoh

Keyword(s):

Quantitative Analysis ◽

Silicon Dioxide ◽

Leakage Currents ◽

Silicon Dioxide Films ◽

Download Full-text

Measurements and Modelling of Thin Silicon Dioxide Films on Silicon

10.21236/ada207853 ◽

1989 ◽

Author(s):

A. Kalnitsky ◽

S. P. Tay ◽

J. P. Ellul ◽

J. W. Andrews ◽

E. A. Irene ◽

...

Keyword(s):

Silicon Dioxide ◽

Silicon Dioxide Films ◽

Download Full-text

Gas Permeation Study and Imperfection Detection of Thermally Grown and Deposited Thin Silicon Dioxide Films

Journal of The Electrochemical Society ◽

10.1149/1.2425375 ◽

1962 ◽

Vol 109 (3) ◽

pp. 221 ◽

Author(s):

S. W. Ing ◽

R. E. Morrison ◽

J. E. Sandor

Keyword(s):

Silicon Dioxide ◽

Gas Permeation ◽

Silicon Dioxide Films ◽

Permeation Study ◽

Thin Silicon ◽

Thermally Grown

Download Full-text

A new type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon

Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits ◽

10.1109/ipfa.1995.487611 ◽

2002 ◽

Author(s):

W.S. Lau ◽

K.S. Pey ◽

W.T. Ng ◽

V. Sane ◽

J.M.C. Heng ◽

...

Keyword(s):

Silicon Dioxide ◽

Type Silicon ◽

Silicon Dioxide Films ◽

New Type ◽

Thin Silicon ◽

Local Defects ◽

Download Full-text

The preparation and characterization of ultra-thin silicon dioxide films on a Mo(110) surface

Surface Science ◽

10.1016/0039-6028(93)90937-f ◽

1993 ◽

Vol 282 (3) ◽

pp. 323-332 ◽

Author(s):

Xueping Xu ◽

D.W. Goodman

Keyword(s):

Silicon Dioxide ◽

Silicon Dioxide Films ◽

Download Full-text

Hydrides and Hydroxyls in Thin Silicon Dioxide Films

Journal of The Electrochemical Society ◽

10.1149/1.2408122 ◽

1971 ◽

Vol 118 (4) ◽

pp. 614 ◽

Author(s):

K. H. Beckmann ◽

N. J. Harrick

Keyword(s):

Silicon Dioxide ◽

Silicon Dioxide Films ◽

Download Full-text

Analytical modeling of stress-induced leakage currents in 5.1–9.6-nm-thick silicon-dioxide films based on two-step inelastic trap-assisted tunneling

Journal of Applied Physics ◽

10.1063/1.1312842 ◽

2000 ◽

Vol 88 (9) ◽

pp. 5238-5245 ◽

Author(s):

Markus Lenski ◽

Tetsuo Endoh ◽

Fujio Masuoka

Keyword(s):

Silicon Dioxide ◽

Analytical Modeling ◽

Leakage Currents ◽

Silicon Dioxide Films ◽

Trap Assisted Tunneling ◽

Assisted Tunneling

Download Full-text

ChemInform Abstract: THE GROWTH AND CHARACTERIZATION OF VERY THIN SILICON DIOXIDE FILMS

Chemischer Informationsdienst ◽

10.1002/chin.198051031 ◽

1980 ◽

Vol 11 (51) ◽

Author(s):

A. C. ADAMS ◽

T. E. SMITH ◽

C. C. CHANG

Keyword(s):

Silicon Dioxide ◽

Silicon Dioxide Films ◽

Download Full-text