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Low-energy ion beam-assisted deposition of giant magnetoresistive thin films
Journal of Applied Physics
◽
10.1063/1.361595
◽
1996
◽
Vol 79
(8)
◽
pp. 4939
Author(s):
S. J. Guilfoyle
◽
R. J. Pollard
◽
P. J. Grundy
Keyword(s):
Thin Films
◽
Ion Beam
◽
Low Energy
◽
Ion Beam Assisted Deposition
Download Full-text
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Mechanical properties of silicon oxynitride thin films prepared by low energy ion beam assisted deposition
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/s0168-583x(98)00811-8
◽
1999
◽
Vol 148
(1-4)
◽
pp. 599-603
◽
Cited By ~ 14
Author(s):
Yukari Shima
◽
Hiroki Hasuyama
◽
Toshiharu Kondoh
◽
Yasuo Imaoka
◽
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◽
...
Keyword(s):
Thin Films
◽
Mechanical Properties
◽
Ion Beam
◽
Silicon Oxynitride
◽
Low Energy
◽
Ion Beam Assisted Deposition
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Low grain size TiN thin films obtained by low energy ion beam assisted deposition
Applied Surface Science
◽
10.1016/s0169-4332(00)00912-0
◽
2001
◽
Vol 173
(3-4)
◽
pp. 290-295
◽
Cited By ~ 20
Author(s):
J.M. López
◽
F.J. Gordillo-Vázquez
◽
O. Böhme
◽
J.M. Albella
Keyword(s):
Thin Films
◽
Grain Size
◽
Ion Beam
◽
Low Energy
◽
Ion Beam Assisted Deposition
◽
Tin Thin Films
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Crystal Growth and Ferroelectric Properties of BaTiO3 Thin Films Deposited on Si Substrate by Low Energy Ion Beam Assisted Deposition Technique
Transactions of the Materials Research Society of Japan
◽
10.14723/tmrsj.32.891
◽
2007
◽
Vol 32
(4)
◽
pp. 891-894
Author(s):
Yasuki Yamamoto
◽
Yuuji Morigo
◽
Katsuhiro Yokota
Keyword(s):
Thin Films
◽
Crystal Growth
◽
Ion Beam
◽
Ferroelectric Properties
◽
Low Energy
◽
Deposition Technique
◽
Si Substrate
◽
Ion Beam Assisted Deposition
Download Full-text
Low energy ion beam assisted deposition of TiN thin films on silicon
Scripta Materialia
◽
10.1016/s1359-6462(99)00393-0
◽
2000
◽
Vol 42
(6)
◽
pp. 573-579
◽
Cited By ~ 17
Author(s):
J.-H Huang
◽
C.-H Lin
◽
C.-H Ma
◽
Haydn Chen
Keyword(s):
Thin Films
◽
Ion Beam
◽
Low Energy
◽
Ion Beam Assisted Deposition
◽
Tin Thin Films
Download Full-text
Plasmonic properties of titanium nitride thin films prepared by ion beam assisted deposition
Materials Letters
◽
10.1016/j.matlet.2016.08.147
◽
2016
◽
Vol 185
◽
pp. 295-298
◽
Cited By ~ 10
Author(s):
Lin-Ao Zhang
◽
Hao-Nan Liu
◽
Xiao-Xia Suo
◽
Shuo Tong
◽
Ying-Lan Li
◽
...
Keyword(s):
Thin Films
◽
Titanium Nitride
◽
Ion Beam
◽
Ion Beam Assisted Deposition
Download Full-text
Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition
Thin Solid Films
◽
10.1016/j.tsf.2005.06.035
◽
2005
◽
Vol 492
(1-2)
◽
pp. 203-206
◽
Cited By ~ 26
Author(s):
Zhi Yan
◽
Zhi Tang Song
◽
Wei Li Liu
◽
Qing Wan
◽
Fu Min Zhang
◽
...
Keyword(s):
Thin Films
◽
Zinc Oxide
◽
Electrical Properties
◽
Ion Beam
◽
Optical And Electrical Properties
◽
Oxide Thin Films
◽
Ion Beam Assisted Deposition
◽
P Type
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A low energy ion beam assisted deposition technique for realizing iso-type SiGe/Si hetero-interface diodes
Thin Solid Films
◽
10.1016/0040-6090(95)08506-8
◽
1996
◽
Vol 283
(1-2)
◽
pp. 182-187
Author(s):
S Mohajerzadeh
◽
C.R Selvakumar
◽
D.E Brodie
◽
M.D Robertson
◽
J.M Corbett
Keyword(s):
Ion Beam
◽
Low Energy
◽
Deposition Technique
◽
Ion Beam Assisted Deposition
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Ion beam assisted deposition of niobium nitride thin films for vacuum microelectronics devices
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/s0168-583x(98)00679-x
◽
1999
◽
Vol 148
(1-4)
◽
pp. 925-929
◽
Cited By ~ 49
Author(s):
Y Gotoh
◽
M Nagao
◽
T Ura
◽
H Tsuji
◽
J Ishikawa
Keyword(s):
Thin Films
◽
Ion Beam
◽
Niobium Nitride
◽
Vacuum Microelectronics
◽
Ion Beam Assisted Deposition
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Effects of the low energy-ion beam assistance in the properties of TiCxNy thin films
Surface and Coatings Technology
◽
10.1016/s0257-8972(01)01559-6
◽
2002
◽
Vol 151-152
◽
pp. 189-193
◽
Cited By ~ 1
Author(s):
G.G. Fuentes
◽
D. Cáceres
◽
I. Vergara
◽
E. Elizalde
◽
J.M. Sanz
Keyword(s):
Thin Films
◽
Ion Beam
◽
Low Energy
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Low-energy Ar+-ion beam induced endotaxial plasmonic Ag nanoparticles in PEDOT:PSS thin-films
Materials Letters
◽
10.1016/j.matlet.2021.130984
◽
2021
◽
pp. 130984
Author(s):
Amardeep Bharti
◽
Richa Bhardwaj
◽
Kanika Upadhyay
◽
Harkawal Singh
◽
Asokan Kandasami
◽
...
Keyword(s):
Thin Films
◽
Ag Nanoparticles
◽
Ion Beam
◽
Low Energy
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