Ion beam assisted deposition of niobium nitride thin films for vacuum microelectronics devices

1999 ◽  
Vol 148 (1-4) ◽  
pp. 925-929 ◽  
Author(s):  
Y Gotoh ◽  
M Nagao ◽  
T Ura ◽  
H Tsuji ◽  
J Ishikawa
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Niobium Nitride ◽  
Vacuum Microelectronics ◽  
Ion Beam Assisted Deposition

scholarly journals Orientation Control of Niobium Nitride Thin Films by Ion Beam Assisted Deposition.

Shinku ◽  
2002 ◽  
Vol 45 (3) ◽  
pp. 215-218
Author(s):  
Yasuhito GOTOH ◽  
Hidenori KITAI ◽  
Hiroshi TSUJI ◽  
Junzo ISHIKAWA
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Niobium Nitride ◽  
Orientation Control ◽  
Ion Beam Assisted Deposition

scholarly journals Evaluation of Zirconium Nitride Thin Films Prepared by Ion Beam Assisted Deposition as a Candidate for Cathode Material of Vacuum Microelectronics Devices.

Shinku ◽  
1997 ◽  
Vol 40 (3) ◽  
pp. 276-279 ◽  
Author(s):  
Yasuhito GOTOH ◽  
Yoshikazu FUJIMORI ◽  
Takashi SHIIGI ◽  
Hiroshi TSUJI ◽  
Junzo ISHIKAWA
Keyword(s):  
Thin Films ◽  
Cathode Material ◽  
Ion Beam ◽  
Zirconium Nitride ◽  
Vacuum Microelectronics ◽  
Ion Beam Assisted Deposition

Plasmonic properties of titanium nitride thin films prepared by ion beam assisted deposition

2016 ◽  
Vol 185 ◽  
pp. 295-298 ◽  
Author(s):  
Lin-Ao Zhang ◽  
Hao-Nan Liu ◽  
Xiao-Xia Suo ◽  
Shuo Tong ◽  
Ying-Lan Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Nitride ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition

Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition

2005 ◽  
Vol 492 (1-2) ◽  
pp. 203-206 ◽  
Author(s):  
Zhi Yan ◽  
Zhi Tang Song ◽  
Wei Li Liu ◽  
Qing Wan ◽  
Fu Min Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Electrical Properties ◽  
Ion Beam ◽  
Optical And Electrical Properties ◽  
Oxide Thin Films ◽  
Ion Beam Assisted Deposition ◽  
P Type

Mössbauer spectroscopic study of iron–nickel nitrides thin films prepared by ion beam assisted deposition

2011 ◽  
Vol 202 (1-3) ◽  
pp. 47-55
Author(s):  
P. Prieto ◽  
M. Monti ◽  
J. de la Figuera ◽  
J. M. Sanz ◽  
J. F. Marco
Keyword(s):  
Thin Films ◽  
Spectroscopic Study ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition ◽  
Iron Nickel

Structures and properties of copper thin films prepared by ion beam assisted deposition

1996 ◽  
Vol 288 (1-2) ◽  
pp. 300-308 ◽  
Author(s):  
Y. Gotoh ◽  
H. Yoshii ◽  
T. Amioka ◽  
K. Kameyama ◽  
H. Tsuji ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition ◽  
Structures And Properties
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