Effects of high temperature rapid thermal annealing using a flat gas flame on the electrical properties of phosphorus‐doped polycrystalline silicon films

1996 ◽  
Vol 79 (11) ◽  
pp. 8498-8502 ◽  
Author(s):  
W. F. Qu ◽  
Y. Masaki ◽  
A. Kitagawa ◽  
M. Suzuki
Keyword(s):  
High Temperature ◽  
Electrical Properties ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Temperature Rapid Thermal Annealing ◽  
Gas Flame ◽  
Polycrystalline Silicon Films ◽  
Phosphorus Doped

Thin-Film Transistors with Polycrystalline Silicon Films Prepared by Two-Step Rapid Thermal Annealing

2000 ◽  
Vol 39 (Part 2, No. 1A/B) ◽  
pp. L19-L21 ◽  
Author(s):  
Huang-Chung Cheng ◽  
Chun-Yao Huang ◽  
Fang-Shing Wang ◽  
Kuen-Hsien Lin ◽  
Fu-Gow Tarntair
Keyword(s):  
Thin Film ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

Polycrystalline silicon films fabricated by rapid thermal annealing

2012 ◽  
Vol 23 (7) ◽  
pp. 1279-1283 ◽  
Author(s):  
Lei Zhang ◽  
Honglie Shen ◽  
Jiayi You ◽  
Feng Jiang ◽  
Tianru Wu ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

Polycrystalline silicon films prepared by improved pulsed rapid thermal annealing

2000 ◽  
Vol 62 (1-2) ◽  
pp. 143-148 ◽  
Author(s):  
Yuwen Zhao ◽  
Wenjing Wang ◽  
Feng Yun ◽  
Ying Xu ◽  
Xianbo Liao ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

Two‐step rapid thermal annealing of B‐ and As‐implanted polycrystalline silicon films

1992 ◽  
Vol 71 (1) ◽  
pp. 273-276
Author(s):  
J. Sicart ◽  
P. Jeanjean ◽  
P. Sellitto ◽  
J. L. Robert ◽  
G. Chaussemy ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Polycrystalline Silicon Films
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