Impact of In situ vacuum anneal and SiH4 treatment on electrical characteristics of AlGaN/GaN metal-oxide-semiconductor high-electron mobility transistors

2011 ◽  
Vol 99 (9) ◽  
pp. 093504 ◽  
Author(s):  
Xinke Liu ◽  
Edwin Kim Fong Low ◽  
Jisheng Pan ◽  
Wei Liu ◽  
Kie Leong Teo ◽  
...  
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