Ion energy distributions in pulsed large area microwave plasma

1999 ◽  
Vol 85 (9) ◽  
pp. 6366-6372 ◽  
Author(s):  
Oleg Zabeida ◽  
Ludvik Martinu
Keyword(s):  
Microwave Plasma ◽  
Large Area ◽  
Energy Distributions ◽  
Ion Energy ◽  
Ion Energy Distributions

scholarly journals Time resolved measurements of hydrogen ion energy distributions in a pulsed 2.45 GHz microwave plasma

2017 ◽  
Vol 24 (11) ◽  
pp. 113501 ◽  
Author(s):  
A. Megía-Macías ◽  
O. D. Cortázar ◽  
O. Tarvainen ◽  
H. Koivisto
Keyword(s):  
Microwave Plasma ◽  
Hydrogen Ion ◽  
Energy Distributions ◽  
Time Resolved ◽  
Ion Energy ◽  
Ion Energy Distributions ◽  
Time Resolved Measurements

Ion energy distributions in rf sheaths; review, analysis and simulation

1999 ◽  
Vol 8 (3) ◽  
pp. R45-R64 ◽  
Author(s):  
E Kawamura ◽  
V Vahedi ◽  
M A Lieberman ◽  
C K Birdsall
Keyword(s):  
Energy Distributions ◽  
Ion Energy ◽  
Review Analysis ◽  
Ion Energy Distributions

scholarly journals Ponderomotive force and ion energy distributions in an rf sheath

1992 ◽  
Vol 68 (1) ◽  
pp. 44-47 ◽  
Author(s):  
S. Hamaguchi ◽  
R. T. Farouki ◽  
M. Dalvie
Keyword(s):  
Ponderomotive Force ◽  
Energy Distributions ◽  
Ion Energy ◽  
Ion Energy Distributions
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