Time resolved measurements of hydrogen ion energy distributions in a pulsed 2.45 GHz microwave plasma

Physics of Plasmas ◽

10.1063/1.5001488 ◽

2017 ◽

Vol 24 (11) ◽

pp. 113501 ◽

Author(s):

A. Megía-Macías ◽

O. D. Cortázar ◽

O. Tarvainen ◽

H. Koivisto

Keyword(s):

Microwave Plasma ◽

Hydrogen Ion ◽

Energy Distributions ◽

Time Resolved ◽

Ion Energy Distributions ◽

Time Resolved Measurements

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Time-resolved measurements of ion energy distributions and optical emissions in pulsed radio-frequency discharges

Journal of Applied Physics ◽

10.1063/1.372148 ◽

2000 ◽

Vol 87 (5) ◽

pp. 2114-2121 ◽

Author(s):

Yicheng Wang ◽

Eric C. Benck ◽

Martin Misakian ◽

Manabu Edamura ◽

James K. Olthoff

Keyword(s):

Radio Frequency ◽

Energy Distributions ◽

Time Resolved ◽

Optical Emissions ◽

Radio Frequency Discharges ◽

Ion Energy Distributions ◽

Time Resolved Measurements

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Time-resolved measurements of ion energy distributions in dual-mode pulsed-microwave/radio frequency plasma

Journal of Applied Physics ◽

10.1063/1.373714 ◽

2000 ◽

Vol 88 (2) ◽

pp. 635-642 ◽

Author(s):

O. Zabeida ◽

A. Hallil ◽

M. R. Wertheimer ◽

L. Martinu

Keyword(s):

Radio Frequency ◽

Radio Frequency Plasma ◽

Dual Mode ◽

Energy Distributions ◽

Time Resolved ◽

Frequency Plasma ◽

Microwave Radio ◽

Ion Energy Distributions ◽

Time Resolved Measurements

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Ion energy distributions in pulsed large area microwave plasma

Journal of Applied Physics ◽

10.1063/1.370139 ◽

1999 ◽

Vol 85 (9) ◽

pp. 6366-6372 ◽

Author(s):

Oleg Zabeida ◽

Ludvik Martinu

Keyword(s):

Microwave Plasma ◽

Energy Distributions ◽

Ion Energy Distributions

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Chemical state profiles from secondary ion energy distributions

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.574973 ◽

1988 ◽

Vol 6 (1) ◽

pp. 81-85 ◽

Author(s):

J. S. Solomon

Keyword(s):

Chemical State ◽

Energy Distributions ◽

Ion Energy Distributions ◽

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Ion Energy Distributions in Multifrequency Capacitive Discharges

2007 IEEE 34th International Conference on Plasma Science (ICOPS) ◽

10.1109/ppps.2007.4345772 ◽

2007 ◽

Author(s):

Alan C. Wu ◽

Michael A. Lieberman ◽

John P. Verboncoeur

Keyword(s):

Energy Distributions ◽

Ion Energy Distributions ◽

Capacitive Discharges

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Spatiotemporal characteristics of the collisionless rf sheath and the ion energy distributions arriving at rf-biased electrodes

Physical Review E ◽

10.1103/physreve.65.036403 ◽

2002 ◽

Vol 65 (3) ◽

Author(s):

Zhong-Ling Dai ◽

You-Nian Wang ◽

Teng-Cai Ma

Keyword(s):

Energy Distributions ◽

Spatiotemporal Characteristics ◽

Ion Energy Distributions

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Use of Zr? secondary ion energy distributions and factor analysis to construct chemical-state depth profiles in SIMS

Surface and Interface Analysis ◽

10.1002/sia.740230902 ◽

1995 ◽

Vol 23 (9) ◽

pp. 573-580 ◽

Author(s):

S. J. Splinter ◽

P. A. W. van der Heide ◽

A. Lin ◽

N. S. McIntyre

Keyword(s):

Factor Analysis ◽

Chemical State ◽

Energy Distributions ◽

Depth Profiles ◽

Ion Energy Distributions ◽

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Study of oxygen effects in secondary ion energy distributions

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(88)90621-0 ◽

1988 ◽

Vol 33 (1-4) ◽

pp. 523-525 ◽

Author(s):

Takeshi Ohwaki ◽

Yasunori Taga

Keyword(s):

Energy Distributions ◽

Oxygen Effects ◽

Ion Energy Distributions ◽

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Measurement of ion energy distributions in the bias enhanced nucleation of chemical vapor deposited diamond

Journal of Applied Physics ◽

10.1063/1.371559 ◽

1999 ◽

Vol 86 (10) ◽

pp. 5549-5555 ◽

Author(s):

Sz. Kátai ◽

Z. Tass ◽

Gy. Hárs ◽

P. Deák

Keyword(s):

Chemical Vapor ◽

Energy Distributions ◽

Chemical Vapor Deposited ◽

Ion Energy Distributions

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Ion energy distributions in rf sheaths; review, analysis and simulation

Plasma Sources Science and Technology ◽

10.1088/0963-0252/8/3/202 ◽

1999 ◽

Vol 8 (3) ◽

pp. R45-R64 ◽

Author(s):

E Kawamura ◽

V Vahedi ◽

M A Lieberman ◽

C K Birdsall

Keyword(s):

Energy Distributions ◽

Review Analysis ◽

Ion Energy Distributions

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