Utilizing upper hybrid resonance for high density plasma production and negative ion generation in a downstream region
Keyword(s):
1998 ◽
Vol 69
(2)
◽
pp. 980-982
◽
1994 ◽
Vol 33
(Part 1, No. 10)
◽
pp. 5950-5958
◽
1997 ◽
Vol 6
(2)
◽
pp. 189-200
◽
2018 ◽
Vol 13
(0)
◽
pp. 1101014-1101014
◽
Keyword(s):
1986 ◽
Vol 4
(4)
◽
pp. 1953-1953
Keyword(s):
Keyword(s):
1985 ◽
Vol 3
(3)
◽
pp. 1229-1233
◽
Keyword(s):
2009 ◽
Vol 55
(2T)
◽
pp. 106-109
◽
Keyword(s):