Erratum: Hydrogen vibrational population distributions and negative ion generation in tandem high density hydrogen discharges [J. Vac. Sci. Technol. A 3, 1229 (1985)]

1986 ◽  
Vol 4 (4) ◽  
pp. 1953-1953
Author(s):  
J. R. Hiskes ◽  
A. M. Karo ◽  
P. A. Willmann
Keyword(s):  
High Density ◽  
Negative Ion ◽  
Ion Generation ◽  
Population Distributions ◽  
Vibrational Population

Hydrogen vibrational population distributions and negative ion concentrations in a medium density hydrogen discharge

1982 ◽  
Vol 53 (5) ◽  
pp. 3469-3475 ◽  
Author(s):  
J. R. Hiskes ◽  
A. M. Karo ◽  
M. Bacal ◽  
A. M. Bruneteau ◽  
W. G. Graham
Keyword(s):  
Negative Ion ◽  
Medium Density ◽  
Ion Concentrations ◽  
Population Distributions ◽  
Hydrogen Discharge ◽  
Vibrational Population

Optimum extracted negative‐ion current densities from tandem high‐density systems

1985 ◽  
Vol 58 (5) ◽  
pp. 1759-1764 ◽  
Author(s):  
J. R. Hiskes ◽  
A. M. Karo ◽  
P. A. Willmann
Keyword(s):  
High Density ◽  
Ion Current ◽  
Negative Ion ◽  
Current Densities

High-density plasma production for neutralizing negative ion beam

1998 ◽  
Vol 69 (2) ◽  
pp. 980-982 ◽  
Author(s):  
M. Y. Tanaka ◽  
M. Bacal ◽  
M. Sasao ◽  
T. Kuroda
Keyword(s):  
Ion Beam ◽  
High Density ◽  
Negative Ion ◽  
Plasma Production ◽  
Density Plasma

Global model analysis of negative ion generation in low-pressure inductively coupled hydrogen plasmas with bi-Maxwellian electron energy distributions

2015 ◽  
Vol 22 (3) ◽  
pp. 033506 ◽  
Author(s):  
Sung-Ryul Huh ◽  
Nam-Kyun Kim ◽  
Bong-Ki Jung ◽  
Kyoung-Jae Chung ◽  
Yong-Seok Hwang ◽  
...  
Keyword(s):  
Electron Energy ◽  
Low Pressure ◽  
Model Analysis ◽  
Global Model ◽  
Negative Ion ◽  
Energy Distributions ◽  
Inductively Coupled ◽  
Hydrogen Plasmas ◽  
Ion Generation
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