Ion-induced grain growth and texturing in refractory thin films—A low temperature process

2012 ◽  
Vol 101 (25) ◽  
pp. 251905 ◽  
Author(s):  
M. Seita ◽  
A. Reiser ◽  
R. Spolenak
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Grain Growth ◽  
Low Temperature Process

Epitaxial Growth of (001)ZrN Thin Films on (001)Si by Low Temperature Process

2005 ◽  
Vol 44 (1A) ◽  
pp. 343-349 ◽  
Author(s):  
Hideto Yanagisawa ◽  
Satoko Shinkai ◽  
Katsutaka Sasaki ◽  
Yoshio Abe ◽  
Akira Sakai ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Epitaxial Growth ◽  
Low Temperature Process

A simple and low temperature process for super-hydrophilic rutile TiO 2 thin films growth

2006 ◽  
Vol 253 (2) ◽  
pp. 581-585 ◽  
Author(s):  
R.S. Mane ◽  
Oh-Shim Joo ◽  
Sun-Ki Min ◽  
C.D. Lokhande ◽  
Sung-Hwan Han
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Low Temperature Process

Cathodoluminescence properties of blue-emitting SrGa2S4:Ce thin-films grown by low-temperature process

2002 ◽  
Vol 92 (2) ◽  
pp. 834-837 ◽  
Author(s):  
Katsu Tanaka ◽  
Shinji Okamoto ◽  
Hiroko Kominami ◽  
Yoichiro Nakanishi ◽  
Xiaolong Du ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Low Temperature Process

Study on Preparation Conditions of High-Quality ZrN Thin Films Using a Low-Temperature Process

1998 ◽  
Vol 37 (Part 1, No. 10) ◽  
pp. 5714-5718 ◽  
Author(s):  
Hideto Yanagisawa ◽  
Katsutaka Sasaki ◽  
Yoshio Abe ◽  
Midori Kawamura ◽  
Satoko Shinkai
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
High Quality ◽  
Preparation Conditions ◽  
Low Temperature Process

Effect of a Boron Additive on the Microstructure and Dielectric Properties of BaTiO3 Thin Films Formed by Nanocrystal Deposition

2013 ◽  
Vol 566 ◽  
pp. 277-280
Author(s):  
Yoko Takezawa ◽  
Minoru Ryu ◽  
Yoshiki Iwazaki ◽  
Toshimasa Suzuki ◽  
Youichi Mizuno ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Dielectric Constant ◽  
Dielectric Properties ◽  
Low Temperature ◽  
Grain Growth ◽  
Particle Sizes ◽  
Sintering Process ◽  
Mn Doped

Highly crystallized BaTiO3 thin films were fabricated by a nanocrystal sintering process. Boron alkoxide was introduced into a slurry of Mn-doped BaTiO3 nanocrystals with particle sizes of 5-7 nm. The deposited nanocrystal film on a (111)-oriented Pt/TiO2/Al2O3 substrate was sintered at a low temperature of 800 °C and the obtained film had highly densified and oriented microstructures. We found that the boron additive enhanced the grain growth of nanoparticles and as a result the dielectric constant of the thin film increased to 1100 at 10 kHz, which is much higher than that of undoped BaTiO3 thin films.

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