scholarly journals The structural and optical properties of black silicon by inductively coupled plasma reactive ion etching

2014 ◽  
Vol 116 (17) ◽  
pp. 173503 ◽  
Author(s):  
Martin Steglich ◽  
Thomas Käsebier ◽  
Matthias Zilk ◽  
Thomas Pertsch ◽  
Ernst-Bernhard Kley ◽  
...  
Keyword(s):  
Optical Properties ◽  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Black Silicon ◽  
Structural And Optical Properties ◽  
Ion Etching ◽  
Inductively Coupled

Resonant Reflectance in Silicon Nanorods Arrays

2015 ◽  
Vol 245 ◽  
pp. 8-13 ◽  
Author(s):  
Lyudmila S. Golobokova ◽  
Yuri V. Nastaushev ◽  
Alexander B. Talochkin ◽  
T.A. Gavrilova ◽  
Fedor N. Dultsev ◽  
...  
Keyword(s):  
Optical Properties ◽  
Electron Beam ◽  
Electron Beam Lithography ◽  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Inductively Coupled ◽  
Ordered Arrays

The optical properties of ordered arrays of silicon nanorods (Si NRs) were investigated. Electron Beam Lithography followed by Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) was used for Si NRs fabrication. Si NRs were chemically and electrically passivated through the deposition of TiONx nanolayer. Tunable color generation from vertical silicon nanorods is demonstrated too.

Fabrication of GaN-based LEDs with 22° undercut sidewalls by inductively coupled plasma reactive ion etching

2013 ◽  
Vol 22 (10) ◽  
pp. 106802
Author(s):  
Bo Wang ◽  
Shi-Chen Su ◽  
Miao He ◽  
Hong Chen ◽  
Wen-Bo Wu ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Inductively Coupled

scholarly journals Inductively Coupled Plasma Reactive Ion Etching of AlGaAsSb and InGaAsSb for Quaternary Antimonide MIM Thermophotovoltaics

2002 ◽  
Author(s):  
M. N. Palmisiano ◽  
G. M. Peake ◽  
R. J. Shul ◽  
C. I. Ashby ◽  
J. G. Cederberg ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Inductively Coupled

Effect of the process parameters of inductively coupled plasma reactive ion etching on the fabrication of diamond nanotips

2014 ◽  
Vol 211 (10) ◽  
pp. 2343-2346 ◽  
Author(s):  
Hasan-al Mehedi ◽  
Vianney Mille ◽  
Jocelyn Achard ◽  
Ovidiu Brinza ◽  
Alix Gicquel
Keyword(s):  
Process Parameters ◽  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Inductively Coupled

Etching characteristics of LiNbO3 in reactive ion etching and inductively coupled plasma

2008 ◽  
Vol 103 (3) ◽  
pp. 034109 ◽  
Author(s):  
Z. Ren ◽  
P. J. Heard ◽  
J. M. Marshall ◽  
P. A. Thomas ◽  
S. Yu
Keyword(s):  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Inductively Coupled
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