scholarly journals Effect of straining graphene on nanopore creation using Si cluster bombardment: A reactive atomistic investigation

2016 ◽  
Vol 120 (22) ◽  
pp. 225108 ◽  
Author(s):  
G. R. Berdiyorov ◽  
B. Mortazavi ◽  
S. Ahzi ◽  
F. M. Peeters ◽  
M. K. Khraisheh
Keyword(s):  
1996 ◽  
Vol 03 (01) ◽  
pp. 1017-1021 ◽  
Author(s):  
J. MATSUO ◽  
M. AKIZUKI ◽  
J. NORTHBY ◽  
G.H. TAKAOKA ◽  
I. YAMADA

A high-current (~100 nA) cluster-ion-beam equipment with a new mass filter has been developed to study the energetic cluster-bombardment effects on solid surfaces. A dramatic reduction of Cu concentration on silicon surfaces has been achieved by 20-keV Ar cluster (N~3000) ion bombardment. The removal rate of Cu with cluster ions is two orders of magnitude higher than that with monomer ions. A significantly higher sputtering yield is expected for cluster-ion irradiation. An energetic cluster-ion beam is quite suitable for removal of metal.


Vacuum ◽  
2020 ◽  
Vol 172 ◽  
pp. 109096
Author(s):  
Vasiliy Pelenovich ◽  
Xiaomei Zeng ◽  
Wenbin Zuo ◽  
Alexander Tolstogouzov ◽  
Gennady Gololobov ◽  
...  

1996 ◽  
Vol 53 (22) ◽  
pp. 14773-14781 ◽  
Author(s):  
M. Beranger ◽  
P. Thevenard ◽  
R. Brenier ◽  
B. Canut ◽  
S. M. M. Ramos ◽  
...  

2006 ◽  
Vol 78 (20) ◽  
pp. 7206-7210 ◽  
Author(s):  
Michael F. Russo ◽  
Barbara J. Garrison

2000 ◽  
Vol 62 (12) ◽  
pp. 8487-8493 ◽  
Author(s):  
Thomas J. Colla ◽  
Ralf Aderjan ◽  
Rolf Kissel ◽  
Herbert M. Urbassek

2012 ◽  
Vol 45 (1) ◽  
pp. 50-53 ◽  
Author(s):  
Daniel A. Brenes ◽  
Zbigniew Postawa ◽  
Andreas Wucher ◽  
Paul Blenkinsopp ◽  
Barbara J. Garrison ◽  
...  

2014 ◽  
Vol 46 (10-11) ◽  
pp. 781-785 ◽  
Author(s):  
M. Vermeulen ◽  
C. Poleunis ◽  
A. Delcorte ◽  
P. Bertrand ◽  
J. Sanyova

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