scholarly journals Highly conformal and high-ionic conductivity thin-film electrolyte for 3D-structured micro batteries: Characterization of LiPON film deposited by MOCVD method

AIP Advances ◽  
2017 ◽  
Vol 7 (8) ◽  
pp. 085110 ◽  
Author(s):  
Takashi Fujibayashi ◽  
Yusuke Kubota ◽  
Katsuhiko Iwabuchi ◽  
Naoki Yoshii
Keyword(s):  
Thin Film ◽  
Ionic Conductivity ◽  
High Ionic Conductivity ◽  
Thin Film Electrolyte ◽  
Film Electrolyte ◽  
Lipon Film

Properties of lithium phosphorus oxynitride (Lipon) for 3D solid-state lithium batteries

2010 ◽  
Vol 25 (8) ◽  
pp. 1507-1515 ◽  
Author(s):  
Fan Xu ◽  
Nancy J. Dudney ◽  
Gabriel M. Veith ◽  
Yoongu Kim ◽  
Can Erdonmez ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Deposition ◽  
3D Structures ◽  
Thin Film Electrolyte ◽  
Axis Alignment ◽  
Film Electrolyte ◽  
Lithium Phosphorus Oxynitride ◽  
Planar Substrates ◽  
3D Solid ◽  
Lipon Film

The thin film electrolyte known as Lipon (lithium phosphorous oxynitride) has proven successful for planar thin film battery applications. Here, the sputter deposition of the amorphous LiPON electrolyte onto more complex 3D structures is examined. The 3D structures include off-axis alignment of planar substrates and also 10–100 μm arrays of pores, columns, and grooves. For magnetron sputtering in N2 gas at 2.6 Pa, the Lipon film deposition is not restricted to be line-of-sight to the target, but forms conformal and dense films over the 3D and off-axis substrates. The deposition rate decreases for areas and grooves that are less accessible by the sputtered flux. The composition varies, but remains within the range that gives sufficient Li+ ionic conductivity, 2 ± 1 μS/cm.

Synthesis and characterization of Ni-cermet/proton conducting thin film electrolyte symmetrical assemblies

2008 ◽  
Vol 179 (38) ◽  
pp. 2155-2159 ◽  
Author(s):  
A ESSOUMHI ◽  
G TAILLADES ◽  
M TAILLADESJACQUIN ◽  
D JONES ◽  
J ROZIERE
Keyword(s):  
Thin Film ◽  
Synthesis And Characterization ◽  
Proton Conducting ◽  
Thin Film Electrolyte ◽  
Film Electrolyte

Morphological, mechanical and thermo-kinetic characterization of coal ash incorporated high performance PEO/PMMA thin film electrolyte composites

2017 ◽  
Vol 4 (11) ◽  
pp. 115304 ◽  
Author(s):  
Sabiha Sultana ◽  
Mohammad Saleem Khan ◽  
Imran Rehan ◽  
Kamran Rehan ◽  
Noor-ul- Amin ◽  
...  
Keyword(s):  
Thin Film ◽  
High Performance ◽  
Coal Ash ◽  
Kinetic Characterization ◽  
Thin Film Electrolyte ◽  
Film Electrolyte
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