Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures

Powder-based techniques are gaining increasing interest for the fabrication of microstructures on planar substrates. A typical approach comprises the filling of a mold pattern with micron-sized particles of the desired material, and their fixation there. Commonly powder-loaded pastes or inks are filled into the molds. To meet the smallest dimensions and highest filling factors, the utilization of dry powder as the raw material is more beneficial. However, an appropriate automated technique for filling a micro mold pattern with dry micron-sized particles is missing up to now. This paper presents a corresponding approach based on the superimposition of high- and low-frequency oscillations for particle mobilization. Rubber balls are utilized to achieve dense packing. For verification, micromagnets are created from 5 µm NdFeB powder on 8” Si substrates, using the novel automated mold filling technique, as well as an existing manual one. Subsequent atomic layer deposition is utilized to agglomerate the loose NdFeB particles into rigid microstructures. The magnetic properties and inner structure of the NdFeB micromagnets are investigated. It is shown that the novel automated technique outperforms the manual one in major terms.

Multi-Device Piezoelectric Direct Discharge for Large Area Plasma Treatment

The piezoelectric cold plasma generators (PCPG) allow for production of the piezoelectric direct discharge (PDD), which is a kind of cold atmospheric pressure plasma (APP). The subjects of this study are different arrays of PCPGs for large-area treatment of planar substrates. Two limiting factors are crucial for design of such arrays: (i) the parasitic coupling between PCPGs resulting in minimum allowed distance between devices, and (ii) the homogeneity of large area treatment, requiring an overlap of the activation zones resulting from each PCPG. The first limitation is investigated by the use of electric measurements. The minimum distance for operation of 4 cm between two PCPGs is determined by measurement of the energy coupling from an active PCPG to a passive one. The capacitive probe is used to evaluate the interference between signals generated by two neighboring PCPGs. The second limitation is examined by activation image recording (AIR). Two application examples illustrate the compromising these two limiting factors: the treatment of large area planar substrates by PCPG array, and the pretreatment of silicon wafers with an array of PCPG driven dielectric barrier discharges (DBD).

Natural killer cell immune synapse formation and cytotoxicity are controlled by tension of the target interface

Natural Killer (NK) cells can kill infected or transformed cells via a lytic immune synapse. Diseased cells may exhibit altered mechanical properties but how this impacts NK cell responsiveness is unknown. We report that human NK cells were stimulated more effectively to secrete granzymes A and B, FasL, granulysin and IFNγ, by stiff (142 kPa) compared to soft (1 kPa) planar substrates. To create surrogate spherical targets of defined stiffness, sodium alginate was used to synthesise soft (9 kPa), medium (34 kPa), or stiff (254 kPa) cell-sized beads, coated with antibodies against activating receptor NKp30 and the integrin LFA-1. Against stiff beads, NK cells showed increased degranulation. Polarisation of the microtubule-organising centre (MTOC) and lytic granules were impaired against soft targets, which instead resulted in the formation of unstable kinapses. Thus, by varying target stiffness to characterise the mechanosensitivity of immune synapses, we identify soft targets as a blind spot in NK cell recognition.

Charged particle guiding and beam splitting with auto-ponderomotive potentials on a chip

Electron and ion beams are indispensable tools in numerous fields of science and technology, ranging from radiation therapy to microscopy and lithography. Advanced beam control facilitates new functionalities. Here, we report the guiding and splitting of charged particle beams using ponderomotive forces created by the motion of charged particles through electrostatic optics printed on planar substrates. Shape and strength of the potential can be locally tailored by the lithographically produced electrodes’ layout and the applied voltages, enabling the control of charged particle beams within precisely engineered effective potentials. We demonstrate guiding of electrons and ions for a large range of energies (from 20 to 5000 eV) and masses (from 5 · 10−4 to 131 atomic mass units) as well as electron beam splitting for energies up to the keV regime as a proof-of-concept for more complex beam manipulation.

Volatile Iridium and Platinum MOCVD Precursors: Chemistry, Thermal Properties, Materials and Prospects for Their Application in Medicine

Interest in iridium and platinum has been steadily encouraged due to such unique properties as exceptional chemical inertia and corrosion resistance, high biological compatibility, and mechanical strength, which are the basis for their application in medical practice. Metal-organic chemical vapor deposition (MOCVD) is a promising method to fabricate Ir and Pt nanomaterials, multilayers, and heterostructures. Its advantages include precise control of the material composition and microstructure in deposition processes at relatively low temperatures onto non-planar substrates. The development of MOCVD processes is inextricably linked with the development of the chemistry of volatile precursors, viz., specially designed coordination and organometallic compounds. This review describes the synthesis methods of various iridium and platinum precursors, their thermal properties, and examples of the use of MOCVD, including formation of films for medical application and bimetallics. Although metal acetylacetonates are currently the most widely used precursors, the recently developed heteroligand Ir(I) and Pt(IV) complexes appear to be more promising in both synthetic and thermochemical aspects. Their main advantage is their ability to control thermal properties by modifying several types of ligands, making them tunable to deposit films onto different types of materials and to select a combination of compatible compounds for obtaining the bimetallic materials.