Adding a low content of soft metals (such as Ag, Au, Cu, etc) in TiN-based films can decrease the friction coefficient of the nitride films. To improve the mechanical properties of the TiAlSiN film, 4.5 at.% Ag was added in the TiAlSiN film. TiAlSiN and TiAlSiN/Ag films were deposited on AISI304 steel by magnetron sputtering using a Ti50Al40Si10target and a Ti50Al40Si10plus an Ag strip, respectively. The microstructure and mechanical properties of the films were investigated by SEM/EDS, XRD, a tribological machine and a microhardness tester. The results show that, with 4.5 at.% Ag addition, the surface morphology of the TiAlSiN film became rougher and its microhardness decreased from 1520±35 HV0.01to 1307±42 HV0.01. The preferred orientation of (111) of the TiAlSiN film changed to randomly and the diffraction peaks became broader due to the Ag addition. The friction coefficient of the TiAlSiN-Ag film decreased compared with the TiAlSiN film, but it showed inferior wear resistance due to its lower microhardness. The effects of Ag addition on the microstructure and mechanical properties of TiAlSiN films were discussed.
Surface Morphology, Microstructure and Mechanical Properties of Thin Ag Films