Temperature-frequency drift suppression via electrostatic stiffness softening in MEMS resonator with weakened duffing nonlinearity

2019 ◽  
Vol 114 (2) ◽  
pp. 023502 ◽  
Author(s):  
Dongyang Chen ◽  
Yong Wang ◽  
Xuying Chen ◽  
Lei Yang ◽  
Jin Xie
Micromachines ◽  
2020 ◽  
Vol 12 (1) ◽  
pp. 26
Author(s):  
Bo Jiang ◽  
Shenhu Huang ◽  
Jing Zhang ◽  
Yan Su

High-quality-factor Micro-Electro-Mechanical System (MEMS) resonators have been widely used in sensors and actuators to obtain great mechanical sensitivity. The frequency drift of resonator with temperature is a problem encountered practically. The paper focuses on the resonator frequency distribution law in the temperature range of—40 to 60 °C. The four-layer models were established to analyze thermal stress caused by temperature due to the mismatch of thermal expansion coefficients. The temperature variation leads to the transformation of stress, which leads to the shift of resonance frequency. The paper analyzes the influence of hard and soft adhesive package on the temperature coefficient of frequency. The resonant accelerometer was employed for the frequency measurements in the paper. In experiments, three types of adhesive dispensing patterns were implemented. The results are consistent with the simulation well. The optimal packaging method achieves −24.1 ppm/°C to −30.2 ppm/°C temperature coefficient of the resonator in the whole temperature range, close to the intrinsic property of silicon (−31 ppm).


2014 ◽  
Vol 1 ◽  
pp. 352-355 ◽  
Author(s):  
Atsushi YAO ◽  
Takashi HIKIHARA
Keyword(s):  

Author(s):  
Mortada Ossama ◽  
Blondy Pierre ◽  
Crunteanu Aurelian ◽  
Chatras Matthieu ◽  
Jean-Christophe Orlianges
Keyword(s):  

2021 ◽  
Vol 502 (2) ◽  
pp. 1856-1863
Author(s):  
G C Mancuso ◽  
D Altamirano ◽  
M Méndez ◽  
M Lyu ◽  
J A Combi

ABSTRACT We detect millihertz quasi-periodic oscillations (mHz QPOs) using the Rossi X-ray Time Explorer (RXTE) from the atoll neutron-star (NS) low-mass X-ray binaries 4U 1608–52 and Aql X–1. From the analysis of all RXTE observations of 4U 1608–52 and Aql X–1, we find mHz QPOs with a significance level >3σ in 49 and 47 observations, respectively. The QPO frequency is constrained between ∼4.2 and 13.4 mHz. These types of mHz QPOs have been interpreted as being the result of marginally stable nuclear burning of He on the NS surface. We also report the discovery of a downward frequency drift in three observations of 4U 1608–52, making it the third source that shows this behaviour. We only find strong evidence of frequency drift in one occasion in Aql X–1, probably because the observations were too short to measure a significant drift. Finally, the mHz QPOs are mainly detected when both sources are in the soft or intermediate states; the cases that show frequency drift only occur when the sources are in intermediate states. Our results are consistent with the phenomenology observed for the NS systems 4U 1636–53 and EXO 0748–676, suggesting that all four sources can reach the conditions for marginally stable burning of He on the NS surface. These conditions depend on the source state in the same manner in all four systems.


1978 ◽  
Vol 5 (8) ◽  
pp. 695-698 ◽  
Author(s):  
J. D. Huba ◽  
P. K. Chaturvedi ◽  
S. L. Ossakow ◽  
D. M. Towle

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