Heavy-particle induced secondary electrons in capacitive radio frequency discharges driven by tailored voltage waveforms
2011 ◽
Vol 20
(4)
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pp. 045007
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Keyword(s):
1963 ◽
Vol 19
(8)
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pp. 1309-1317
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1999 ◽
Vol 119
(6)
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pp. 866-871
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1991 ◽
Vol 19
(2)
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pp. 122-129
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2017 ◽
Vol 15
(3)
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pp. 1700169
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Keyword(s):
1989 ◽
Vol 7
(6)
◽
pp. 3332-3336
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2003 ◽
Vol 150
(10)
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pp. C723
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