Electron energy probability function modulation with external electron beam in capacitive coupled radio frequency discharges

2017 ◽  
Vol 15 (3) ◽  
pp. 1700169 ◽  
Author(s):  
Ya Zhang ◽  
Jia-long Huang ◽  
Lin Yi ◽  
Hong-yu Wang ◽  
Wei Jiang
Keyword(s):  
Electron Beam ◽  
Radio Frequency ◽  
Electron Energy ◽  
Probability Function ◽  
Radio Frequency Discharges

Gap length effect on electron energy distribution in capacitive radio frequency discharges

2007 ◽  
Vol 91 (22) ◽  
pp. 221501 ◽  
Author(s):  
S. J. You ◽  
S. S. Kim ◽  
Jung-Hyung Kim ◽  
Dae-Jin Seong ◽  
Yong-Hyeon Shin ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Radio Frequency ◽  
Electron Energy ◽  
Electron Energy Distribution ◽  
Length Effect ◽  
Radio Frequency Discharges

Estimation of Nanometer-Sized EB Patterning Using Energy Deposition Distribution in Monte Carlo Simulation

2011 ◽  
Vol 497 ◽  
pp. 127-132 ◽  
Author(s):  
Hui Zhang ◽  
Takuro Tamura ◽  
You Yin ◽  
Sumio Hosaka
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Electron Beam ◽  
Energy Distribution ◽  
Electron Energy ◽  
Electron Beam Lithography ◽  
Energy Deposition ◽  
Si Substrate ◽  
Positive Resist

We have studied on theoretical electron energy deposition in thin resist layer on Si substrate for electron beam lithography. We made Monte Carlo simulation to calculate the energy distribution and to consider formation of nanometer sized pattern regarding electron energy, resist thickness and resist type. The energy distribution in 100 nm-thick resist on Si substrate were calculated for small pattern. The calculations show that 4 nm-wide pattern will be formed when resist thickness is less than 30 nm. Furthermore, a negative resist is more suitable than positive resist by the estimation of a shape of the energy distribution.

A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experiments

1997 ◽  
Vol 82 (5) ◽  
pp. 2060-2071 ◽  
Author(s):  
G. J. Nienhuis ◽  
W. J. Goedheer ◽  
E. A. G. Hamers ◽  
W. G. J. H. M. van Sark ◽  
J. Bezemer
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Self Consistent ◽  
Radio Frequency Discharges

Excitation in radio-frequency discharges

1963 ◽  
Vol 19 (8) ◽  
pp. 1309-1317 ◽  
Author(s):  
R. Mavrodineanu ◽  
R.C. Hughes
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharges

Design and development of radio frequency system for pulse positron low energy beam and its electron beam trials

2021 ◽  
Vol 16 (09) ◽  
pp. T09002
Author(s):  
S. Shrotriya ◽  
S. Mukherjee ◽  
S.S. Jena ◽  
A. Shiju ◽  
N. Patel ◽  
...  
Keyword(s):  
Electron Beam ◽  
Radio Frequency ◽  
Low Energy ◽  
Design And Development ◽  
Energy Beam
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