Similarity of capacitive radio-frequency discharges in nonlocal regimes
1963 ◽
Vol 19
(8)
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pp. 1309-1317
◽
1991 ◽
Vol 19
(2)
◽
pp. 122-129
◽
2017 ◽
Vol 15
(3)
◽
pp. 1700169
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Keyword(s):
1989 ◽
Vol 7
(6)
◽
pp. 3332-3336
◽
2003 ◽
Vol 150
(10)
◽
pp. C723
◽