This paper investigated the fabrication and design of embedded Ni-chrome thin-film strain gauges as micro-sensors in tool holders to measure the cutting force in machining operations. A Ni-chrome thin film as piezoresistive material sensor device is embedded within a substrate structure through brazing bonding process, which consists of a Ti6Al4V substrate, a Nickel-chromium thin film sensor and an Alumina insulating layer. The thin-films were characterized by 3D Super Depth Digital Microscope, SEM/EDS, Stylus profiler, to study microstructure, material composition, thickness and sheet resistance respectively. The thin-film strain gauges are calibrated in a cantilever beam setup. Accordingly, in-process cutting force measurement systems are established. The results showed that the thin-film sensor had good linearity and more elaborate structure and superior properties.
The effect of annealing process on the performance of strain nickel–chromium thin film sensor
