Design and development of a compact ion implanter and plasma diagnosis facility based on a 2.45 GHz microwave ion source

2021 ◽  
Vol 92 (5) ◽  
pp. 053306
Author(s):  
Ram Swaroop ◽  
Narender Kumar ◽  
G. Rodrigues ◽  
D. Kanjilal ◽  
I. Banerjee ◽  
...  
Keyword(s):  
Ion Source ◽  
Design And Development ◽  
Plasma Diagnosis ◽  
Microwave Ion Source

Development of microwave ion source for industrial applications

2014 ◽  
Vol 85 (2) ◽  
pp. 02C306 ◽  
Author(s):  
N. Takahashi ◽  
H. Murata ◽  
H. Mitsubori ◽  
J. Sakuraba ◽  
T. Soga ◽  
...  
Keyword(s):  
Industrial Applications ◽  
Ion Source ◽  
Microwave Ion Source

scholarly journals Development of new magnets for a microwave ion source

2018 ◽  
Author(s):  
Nobuaki Takahashi ◽  
Hirohiko Murata ◽  
Hitoshi Mitsubori ◽  
Tomohiro Soga ◽  
Yasushi Aoki ◽  
...  
Keyword(s):  
Ion Source ◽  
Microwave Ion Source

Minipermanent magnet high-current microwave ion source

2006 ◽  
Vol 77 (3) ◽  
pp. 03A305 ◽  
Author(s):  
Zhizhong Song ◽  
Shixiang Peng ◽  
Jinxiang Yu ◽  
Jianchuan Ming ◽  
Zhongxi Yuan ◽  
...  
Keyword(s):  
Ion Source ◽  
High Current ◽  
Microwave Ion Source

Development and test of 2.45 GHz microwave ion source based intense ion beam experimental facility

Vacuum ◽  
2016 ◽  
Vol 124 ◽  
pp. 55-59 ◽  
Author(s):  
Narender Kumar ◽  
G. Rodrigues ◽  
Y. Mathur ◽  
S. Ojha ◽  
R. Ahuja ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Source ◽  
Experimental Facility ◽  
Microwave Ion Source

scholarly journals Characteristics of a High Current Microwave Ion Source for Oxygen Ion Implanter.

Shinku ◽  
1999 ◽  
Vol 42 (7) ◽  
pp. 670-675 ◽  
Author(s):  
Takayoshi SEKI ◽  
Katsumi TOKIGUCHI
Keyword(s):  
Ion Source ◽  
High Current ◽  
Oxygen Ion ◽  
Microwave Ion Source

scholarly journals Operational characteristic of a compact microwave ion source

Vacuum ◽  
1986 ◽  
Vol 36 (11-12) ◽  
pp. 869-871 ◽  
Author(s):  
SR Walther ◽  
KN Leung
Keyword(s):  
Ion Source ◽  
Operational Characteristic ◽  
Microwave Ion Source
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