scholarly journals Application of compact microwave ion source to low temperature growth of transition metal nitride thin films for vacuum microelectronics devices

2000 ◽  
Vol 71 (2) ◽  
pp. 1002-1005 ◽  
Author(s):  
Y. Gotoh ◽  
H. Tsuji ◽  
J. Ishikawa
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Transition Metal ◽  
Ion Source ◽  
Metal Nitride ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Transition Metal Nitride ◽  
Vacuum Microelectronics ◽  
Microwave Ion Source

A novel low-temperature growth of uniform CuInS2 thin films and their application in selenization/sulfurization-free CuInS2 solar cells

2021 ◽  
Vol 26 ◽  
pp. 102050
Author(s):  
Mehdi Dehghani ◽  
Ershad Parvazian ◽  
Nastaran Alamgir Tehrani ◽  
Nima Taghavinia ◽  
Mahmoud Samadpour
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Low Temperature ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Cuins2 Thin Films

Low-Temperature Growth of Ferroelectric Hf0.5Zr0.5O2 Thin Films Assisted by Deep Ultraviolet Light Irradiation

2021 ◽  
Vol 3 (3) ◽  
pp. 1244-1251
Author(s):  
Hyunjin Joh ◽  
Gopinathan Anoop ◽  
Won-June Lee ◽  
Dipjyoti Das ◽  
Jun Young Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Ultraviolet Light ◽  
Light Irradiation ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Ultraviolet Light Irradiation ◽  
Deep Ultraviolet

scholarly journals SYNTHESIS OF TRANSITION METAL NITRIDE AT LOW TEMPERATURE FROM COMPLEXED PRECURSOR

2019 ◽  
pp. 1-7
Author(s):  
Rayane Ricardo da Silva ◽  
Carlson Pereira de Souza ◽  
André Luís Lopes Moriyama
Keyword(s):  
Low Temperature ◽  
Transition Metal ◽  
Metal Nitride ◽  
Transition Metal Nitride
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