scholarly journals Measuring the electron temperature and identifying plasma detachment using machine learning and spectroscopy

2021 ◽  
Vol 92 (4) ◽  
pp. 043520
Author(s):  
C. M. Samuell ◽  
A. G. Mclean ◽  
C. A. Johnson ◽  
F. Glass ◽  
A. E. Jaervinen

Coatings ◽  
2021 ◽  
Vol 11 (10) ◽  
pp. 1221
Author(s):  
Jun-Hyoung Park ◽  
Ji-Ho Cho ◽  
Jung-Sik Yoon ◽  
Jung-Ho Song

We present a non-invasive approach for monitoring plasma parameters such as the electron temperature and density inside a radio-frequency (RF) plasma nitridation device using optical emission spectroscopy (OES) in conjunction with multivariate data analysis. Instead of relying on a theoretical model of the plasma emission to extract plasma parameters from the OES, an empirical correlation was established on the basis of simultaneous OES and other diagnostics. Additionally, we developed a machine learning (ML)-based virtual metrology model for real-time Te and ne monitoring in plasma nitridation processes using an in situ OES sensor. The results showed that the prediction accuracy of electron density was 97% and that of electron temperature was 90%. This method is especially useful in plasma processing because it provides in-situ and real-time analysis without disturbing the plasma or interfering with the process.



Author(s):  
Jiaolong Dong ◽  
Jianchao Li ◽  
Yonghua Ding ◽  
Xiaoqing Zhang ◽  
Nengchao Wang ◽  
...  


2020 ◽  
Vol 43 ◽  
Author(s):  
Myrthe Faber

Abstract Gilead et al. state that abstraction supports mental travel, and that mental travel critically relies on abstraction. I propose an important addition to this theoretical framework, namely that mental travel might also support abstraction. Specifically, I argue that spontaneous mental travel (mind wandering), much like data augmentation in machine learning, provides variability in mental content and context necessary for abstraction.



1997 ◽  
Vol 241-243 (1) ◽  
pp. 349-352
Author(s):  
N Ezumi


2020 ◽  
Author(s):  
Man-Wai Mak ◽  
Jen-Tzung Chien


2020 ◽  
Author(s):  
Mohammed J. Zaki ◽  
Wagner Meira, Jr
Keyword(s):  


2020 ◽  
Author(s):  
Marc Peter Deisenroth ◽  
A. Aldo Faisal ◽  
Cheng Soon Ong
Keyword(s):  


Author(s):  
Lorenza Saitta ◽  
Attilio Giordana ◽  
Antoine Cornuejols


Author(s):  
Shai Shalev-Shwartz ◽  
Shai Ben-David
Keyword(s):  


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