Transmission electron microscopy analysis of reduction reactions and phase transformations in Nb2O5 films deposited by atomic layer deposition

2021 ◽  
Vol 129 (2) ◽  
pp. 025304
Author(s):  
M. E. Twigg ◽  
A. C. Kozen ◽  
L. B. Ruppalt ◽  
S. M. Prokes ◽  
H. S. Cho
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Atomic Layer Deposition ◽  
Phase Transformations ◽  
Atomic Layer ◽  
Transmission Electron Microscopy Analysis ◽  
Transmission Electron ◽  
Layer Deposition ◽  
Electron Microscopy Analysis ◽  
Microscopy Analysis
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