scholarly journals Transient CO desorption from thin Pt films induced by mid-IR pumping

2021 ◽  
Vol 154 (8) ◽  
pp. 084706
Author(s):  
Gökçen Tek ◽  
Peter Hamm
Keyword(s):  
Author(s):  
Wentao Qin ◽  
Dorai Iyer ◽  
Jim Morgan ◽  
Carroll Casteel ◽  
Robert Watkins ◽  
...  

Abstract Ni(5 at.%Pt ) films were silicided at a temperature below 400 °C and at 550 °C. The two silicidation temperatures had produced different responses to the subsequent metal etch. Catastrophic removal of the silicide was seen with the low silicidation temperature, while the desired etch selectivity was achieved with the high silicidation temperature. The surface microstructures developed were characterized with TEM and Auger depth profiling. The data correlate with both silicidation temperatures and ultimately the difference in the response to the metal etch. With the high silicidation temperature, there existed a thin Si-oxide film that was close to the surface and embedded with particles which contain metals. This thin film is expected to contribute significantly to the desired etch selectivity. The formation of this layer is interpreted thermodynamically.


2010 ◽  
Vol 1250 ◽  
Author(s):  
Kentaro Kinoshita ◽  
Tatsuya Makino ◽  
Yoda Takatoshi ◽  
Dobashi Kazufumi ◽  
Kishida Satoru

AbstractBoth a low resistance state and a high resistance state which were written by the voltage application in a local region of NiO/Pt films by using conducting atomic force microscopy (C-AFM) were observed by using scanning electron microscope (SEM) and electron probe micro analysis (EPMA). The writing regions are distinguishable as dark areas in a secondary electron image and thus can be specified without using complicated sample fabrication process to narrow down the writing regions such as the photolithography technique. In addition, the writing regions were analyzed by using energy dispersive X-ray spectroscopy (EDS) mapping. No difference between the inside and outside of the writing regions is observed for all the mapped elements including C and Rh. Here, C and Rh are the most probable candidates for contamination which affect the secondary electron image. Therefore, our results suggested that the observed change in the contrast of the second electron image is related to the intrinsic change in the electronic state of the NiO film and a secondary electron yield is correlated to the physical properties of the film.


2017 ◽  
Vol 146 (5) ◽  
pp. 052818 ◽  
Author(s):  
I. J. M. Erkens ◽  
M. A. Verheijen ◽  
H. C. M. Knoops ◽  
W. Keuning ◽  
F. Roozeboom ◽  
...  

1993 ◽  
Vol 118 (3) ◽  
pp. 387-393 ◽  
Author(s):  
A. Tsoukatos ◽  
H. Wan ◽  
G.C. Hadjipanayis ◽  
Y.J. Zhang ◽  
M. Waite ◽  
...  
Keyword(s):  

2007 ◽  
Vol 314 (2) ◽  
pp. 116-121 ◽  
Author(s):  
K. Žužek Rožman ◽  
A. Krause ◽  
K. Leistner ◽  
S. Fähler ◽  
L. Schultz ◽  
...  

1995 ◽  
Vol 13 (3) ◽  
pp. 1484-1488 ◽  
Author(s):  
Jie Guan ◽  
Robert A. Campbell ◽  
Theodore E. Madey
Keyword(s):  

2013 ◽  
Vol 87 (5) ◽  
Author(s):  
D. Meier ◽  
T. Kuschel ◽  
L. Shen ◽  
A. Gupta ◽  
T. Kikkawa ◽  
...  
Keyword(s):  

2001 ◽  
Vol 37 (4) ◽  
pp. 1312-1314 ◽  
Author(s):  
Kyung-Hwan Na ◽  
Jong-Gab Na ◽  
Hi-Jung Kim ◽  
Pyung-Woo Jang ◽  
Jong-Ryoul Kim ◽  
...  

1989 ◽  
Author(s):  
R. Nishikawa ◽  
T. Hikosaka ◽  
K. Igarashi ◽  
M. Kanamaru
Keyword(s):  

Sign in / Sign up

Export Citation Format

Share Document