Dynamics of Ar metastable and resonance states in pulsed capacitively coupled plasmas
2015 ◽
Vol 33
(2)
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pp. 021310
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2015 ◽
Vol 24
(4)
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pp. 045013
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Keyword(s):
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2011 ◽
Vol 44
(45)
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pp. 455203
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Keyword(s):