Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas
2015 ◽
Vol 24
(3)
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pp. 034002
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2017 ◽
Vol 26
(8)
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pp. 085006
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2016 ◽
Vol 25
(5)
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pp. 055002
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2017 ◽
Vol 26
(12)
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pp. 124001
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2018 ◽
Vol 27
(6)
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pp. 064004
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2019 ◽
Vol 16
(11)
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pp. 1900093
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2009 ◽
Vol 6
(S1)
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pp. S458-S461
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