Excitation function measurement and reaction mechanism analysis for alpha-induced reactions on

Chemical mechanical polishing (CMP) of Cu pattern wafer based alkaline slurry in GLSI with R(NH2)n as complexing agent was investigated. In Cu CMP procedure, it is necessary to minimize the surface dishing and erosion while maintaining good planarity. This requirements are met through the complexing agents. Based on the reaction mechanism analysis of Cu in alkaline slurry with R(NH2)n as complexing agent in CMP, the performance of Cu dishing and erosion were discussed. The results showed that the slurry stability can be improved obviously by the addition of R(NH2)n as complexing agent, both Cu1 and Cu2 have good dishing and erosion performance. Furthermore, the dishing condition of Cu2 (180-230nm) is better than that of Cu1 (280-370nm), and the erosion condition of Cu2 (230-260nm) is also better than that of Cu1 (450-500nm).

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Evaporation residue excitation function measurement for the16O+194Ptreaction

Physical Review C ◽

10.1103/physrevc.84.064606 ◽

2011 ◽

Vol 84 (6) ◽

Cited By ~ 23

Author(s):

E. Prasad ◽

K. M. Varier ◽

N. Madhavan ◽

S. Nath ◽

J. Gehlot ◽

...

Keyword(s):

Excitation Function ◽

Evaporation Residue ◽

Function Measurement

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Reaction Mechanism Analysis of a Li-O2 Battery: Structure of Electrode/Electrolyte Interface Probed Via Soft-x-Ray Absorption Spectroscopy, Hard x-Ray Photoelectron Spectroscopy, and in-Situ Hard x-Ray Diffraction

ECS Meeting Abstracts ◽

10.1149/ma2015-02/3/253 ◽

2015 ◽

Keyword(s):

Reaction Mechanism ◽

Absorption Spectroscopy ◽

Photoelectron Spectroscopy ◽

Mechanism Analysis ◽

X Ray Diffraction ◽

X Ray ◽

Electrolyte Interface ◽

X Ray Absorption

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Thermal degradation characteristics, kinetics, thermodynamic, and reaction mechanism analysis of pistachio shell pyrolysis for its bioenergy potential

Biomass Conversion and Biorefinery ◽

10.1007/s13399-020-01104-2 ◽

2020 ◽

Author(s):

Supriya Gupta ◽

Goutam Kishore Gupta ◽

Monoj Kumar Mondal

Keyword(s):

Reaction Mechanism ◽

Thermal Degradation ◽

Mechanism Analysis ◽

Pistachio Shell

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Non-equilibrium reaction mechanism in alpha-particle induced excitation function for 209Bi up to 60 MeV

International Journal of Radiation Applications and Instrumentation Part A Applied Radiation and Isotopes ◽

10.1016/0883-2889(90)90112-t ◽

1990 ◽

Vol 41 (2) ◽

pp. 215-219 ◽

Cited By ~ 10

Author(s):

I.A. Rizvi ◽

M.K. Bhardwaj ◽

M.Afzal Ansari ◽

A.K. Chaubey

Keyword(s):

Reaction Mechanism ◽

Excitation Function ◽

Alpha Particle ◽

Equilibrium Reaction ◽

Non Equilibrium

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Carbothermic Reduction and Chlorination of Alumina with Coal in Vacuum

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.443-444.862 ◽

2012 ◽

Vol 443-444 ◽

pp. 862-865

Author(s):

Qing Chun Yu ◽

Ping Yan Wang ◽

Bin Yang ◽

Chong Long Cui ◽

Han Zhang ◽

...

Keyword(s):

Reaction Mechanism ◽

Aluminum Chloride ◽

Carbothermic Reduction ◽

Probable Mechanism ◽

Vacuum Furnace ◽

Mechanism Analysis ◽

Metal Aluminum

Metal aluminum was produced in a vacuum furnace using coal as reductant and aluminum chloride as chlorination agent and examined by means of XRD and SEM. The produced metal aluminum was impure. Reaction mechanism analysis showed that the carbothermic reduction of alumina with coal occurred following the chlorination, then metal aluminum was accquired and condensed on the collecting plate. A probable mechanism concerning carbothermic reduction and chlorination was discussed.

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