Effects of dielectric charging on the output voltage of a capacitive accelerometer

2016 ◽  
Vol 26 (11) ◽  
pp. 115001 ◽  
Author(s):  
Hao Qu ◽  
Huijun Yu ◽  
Wu Zhou ◽  
Bei Peng ◽  
Peng Peng ◽  
...  
Keyword(s):  
Output Voltage ◽  
Dielectric Charging ◽  
Capacitive Accelerometer

Design Issues in Beam Structures for Performance Enhancement of MEMS Based Capacitive Accelerometer

2017 ◽  
Vol 26 (04) ◽  
pp. 1740023
Author(s):  
Keya Sanyal ◽  
Kalyan Biswas
Keyword(s):  
Output Voltage ◽  
Parametric Optimization ◽  
Performance Enhancement ◽  
Proof Mass ◽  
Device Performance ◽  
Beam Structure ◽  
Shaped Beam ◽  
Capacitive Accelerometer ◽  
Existing Structure ◽  
Finite Element Methodology

Structure of a MEMS based Capacitive Accelerometer has been analyzed in this paper. The symmetrical beam-mass structure with different interconnection has been investigated using Finite Element methodology. The simulation model is calibrated with the existing structure of H-shaped beam capacitive accelerometer. Then a rigorous simulation and analysis is carried out to propose new beam structure with improved sensitivity. Analytical model has been evaluated using MATLAB software. Output voltage of the device for a given acceleration is calculated and sensitivity of the device is also analyzed. To improve sensitivity of the device, two new connector structures such as Z-shaped beam and Ω-shaped beam capacitive accelerometer has been proposed. For a particular acceleration, displacement of the proof mass with new structures is increased almost 57% and 66% and the sensitivity has been improved from 7.71pF/g to 13.0pF/g and 13.8pF/g respectively. Parametric optimization of the Ω-shaped beam capacitive accelerometer has also been described for further improvement of device performance.

Attenuation of the dielectric charging-induced drift in capacitive accelerometer by AC bias voltage

2017 ◽  
Vol 16 (03) ◽  
pp. 1 ◽  
Author(s):  
Hao Qu ◽  
Huijun Yu ◽  
Bei Peng ◽  
Peng Peng ◽  
Hao Wang ◽  
...  
Keyword(s):  
Bias Voltage ◽  
Dielectric Charging ◽  
Capacitive Accelerometer

FREQUENCY CONVERTER WITH THE REDUCED THD OF THE OUTPUT VOLTAGE

2016 ◽  
Vol 2016 (5) ◽  
pp. 14-16 ◽  
Author(s):  
G.V. Pavlov ◽  
◽  
I.L. Vinnichenko ◽  
A.V. Obrubov ◽  
◽  
...  
Keyword(s):  
Output Voltage ◽  
Frequency Converter

Output Voltage Characteristics of Eddy Current Displacement Sensor for Various Heat Treatments of Measuring Objects

2008 ◽  
Vol 128 (4) ◽  
pp. 289-297 ◽  
Author(s):  
Tsutomu Mizuno ◽  
Shigemi Enoki ◽  
Takashi Asahina ◽  
Takayuki Suzuki ◽  
Hiroyuki Maeda ◽  
...  
Keyword(s):  
Eddy Current ◽  
Output Voltage ◽  
Heat Treatments ◽  
Displacement Sensor
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