Time evolution of ion energy distributions and optical emissions in pulsed radio frequency plasmas

2003 ◽  
Author(s):  
M. Misakian ◽  
E. Benck ◽  
Y. Wang ◽  
J. Olthoff ◽  
J. Roberts
Keyword(s):  
Radio Frequency ◽  
Time Evolution ◽  
Energy Distributions ◽  
Ion Energy ◽  
Optical Emissions ◽  
Ion Energy Distributions

Ion energy distributions in dual‐ and single‐mode microwave/radio‐frequency plasma

1995 ◽  
Vol 78 (8) ◽  
pp. 4855-4858 ◽  
Author(s):  
P. Reinke ◽  
S. Bureau ◽  
J. E. Klemberg‐Sapieha ◽  
L. Martinu
Keyword(s):  
Radio Frequency ◽  
Single Mode ◽  
Radio Frequency Plasma ◽  
Energy Distributions ◽  
Ion Energy ◽  
Frequency Plasma ◽  
Microwave Radio ◽  
Ion Energy Distributions

Ion energy distributions in radio‐frequency discharges

1991 ◽  
Vol 70 (1) ◽  
pp. 82-92 ◽  
Author(s):  
D. Field ◽  
D. F. Klemperer ◽  
P. W. May ◽  
Y. P. Song
Keyword(s):  
Radio Frequency ◽  
Energy Distributions ◽  
Ion Energy ◽  
Radio Frequency Discharges ◽  
Ion Energy Distributions

Ion energy distributions in SF6plasmas at a radio‐frequency powered electrode

1996 ◽  
Vol 80 (1) ◽  
pp. 56-65 ◽  
Author(s):  
F. Becker ◽  
I. W. Rangelow ◽  
R. Kassing
Keyword(s):  
Radio Frequency ◽  
Energy Distributions ◽  
Ion Energy ◽  
Ion Energy Distributions
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