Ion energy distributions in inductively coupled radio-frequency discharges in argon, nitrogen, oxygen, chlorine, and their mixtures

1999 ◽  
Vol 85 (9) ◽  
pp. 6358-6365 ◽  
Author(s):  
Yicheng Wang ◽  
J. K. Olthoff
Keyword(s):  
Radio Frequency ◽  
Energy Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Radio Frequency Discharges ◽  
Ion Energy Distributions

Ion energy distributions in radio‐frequency discharges

1991 ◽  
Vol 70 (1) ◽  
pp. 82-92 ◽  
Author(s):  
D. Field ◽  
D. F. Klemperer ◽  
P. W. May ◽  
Y. P. Song
Keyword(s):  
Radio Frequency ◽  
Energy Distributions ◽  
Ion Energy ◽  
Radio Frequency Discharges ◽  
Ion Energy Distributions

scholarly journals Ion energy distributions in inductively coupled plasmas having a biased boundary electrode

2012 ◽  
Vol 21 (6) ◽  
pp. 065009 ◽  
Author(s):  
Michael D Logue ◽  
Hyungjoo Shin ◽  
Weiye Zhu ◽  
Lin Xu ◽  
Vincent M Donnelly ◽  
...  
Keyword(s):  
Inductively Coupled Plasmas ◽  
Energy Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Ion Energy Distributions ◽  
Coupled Plasmas
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