Driving frequency effect on discharge parameters and higher harmonic generation in capacitive discharges at constant power densities
2019 ◽
Vol 52
(36)
◽
pp. 365201
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Keyword(s):
2018 ◽
Vol 60
(7)
◽
pp. 074007
◽
Keyword(s):
2003 ◽
Vol 507
(1-2)
◽
pp. 404-408
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Keyword(s):