scholarly journals Control of electron dynamics, radical and metastable species generation in atmospheric pressure RF plasma jets by Voltage Waveform Tailoring

2019 ◽  
Vol 28 (9) ◽  
pp. 094001 ◽  
Author(s):  
I Korolov ◽  
Z Donkó ◽  
G Hübner ◽  
L Bischoff ◽  
P Hartmann ◽  
...  
2019 ◽  
Vol 28 (1) ◽  
pp. 01LT01 ◽  
Author(s):  
Andrew R Gibson ◽  
Zoltán Donkó ◽  
Layla Alelyani ◽  
Lena Bischoff ◽  
Gerrit Hübner ◽  
...  

2008 ◽  
Vol 80 (9) ◽  
pp. 1919-1930 ◽  
Author(s):  
Gheorghe Dinescu ◽  
Eusebiu R. Ionita

We report on the operation and characteristics of radio frequency (RF) plasma beam sources based on the expansion of the discharge outside of limited spaces with small interelectrode gaps. The appropriate electrode configuration, combined with high mass flow values and appropriate power levels, leads to small- or large-size plasma jets, working stably at low, intermediate, and atmospheric pressures. The sources are promising tools for a wide range of applications in thin film deposition, surface modification, and cleaning, including the case of temperature-sensitive substrates.


2020 ◽  
Vol 53 (18) ◽  
pp. 185201 ◽  
Author(s):  
I Korolov ◽  
M Leimkühler ◽  
M Böke ◽  
Z Donkó ◽  
V Schulz-von der Gathen ◽  
...  

2022 ◽  
Author(s):  
Caleb Richards ◽  
Elijah Jans ◽  
Ilya Gulko ◽  
Keegan Orr ◽  
Igor V. Adamovich

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