scholarly journals Energy efficiency of voltage waveform tailoring for the generation of excited species in RF plasma jets operated in He/N2mixtures

Author(s):  
Ihor Korolov ◽  
Zoltan Donko ◽  
Gerrit Hübner ◽  
Yue Liu ◽  
Thomas Mussenbrock ◽  
...  
2008 ◽  
Vol 80 (9) ◽  
pp. 1919-1930 ◽  
Author(s):  
Gheorghe Dinescu ◽  
Eusebiu R. Ionita

We report on the operation and characteristics of radio frequency (RF) plasma beam sources based on the expansion of the discharge outside of limited spaces with small interelectrode gaps. The appropriate electrode configuration, combined with high mass flow values and appropriate power levels, leads to small- or large-size plasma jets, working stably at low, intermediate, and atmospheric pressures. The sources are promising tools for a wide range of applications in thin film deposition, surface modification, and cleaning, including the case of temperature-sensitive substrates.


2020 ◽  
Vol MA2020-01 (17) ◽  
pp. 1110-1110
Author(s):  
Daren Caruana ◽  
M Emre Sener ◽  
Maria Calleja ◽  
Atif Elahi
Keyword(s):  

Author(s):  
Pablo Donolo ◽  
Martin Pezzani ◽  
Guillermo Bossio ◽  
Enrique C. Quispe ◽  
Diego Valencia ◽  
...  

2020 ◽  
Vol 53 (18) ◽  
pp. 185201 ◽  
Author(s):  
I Korolov ◽  
M Leimkühler ◽  
M Böke ◽  
Z Donkó ◽  
V Schulz-von der Gathen ◽  
...  

2022 ◽  
Author(s):  
Caleb Richards ◽  
Elijah Jans ◽  
Ilya Gulko ◽  
Keegan Orr ◽  
Igor V. Adamovich

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