Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude

2020 ◽  
Vol 29 (6) ◽  
pp. 065003 ◽  
Author(s):  
Tomáš Kozák ◽  
Andrea Dagmar Pajdarová ◽  
Martin Čada ◽  
Zdeněk Hubička ◽  
Pavel Mareš ◽  
...  
Keyword(s):  
Energy Distributions ◽  
Pulse Delay ◽  
Ion Energy ◽  
Positive Pulse ◽  
Ion Energy Distributions

Ion energy distributions in rf sheaths; review, analysis and simulation

1999 ◽  
Vol 8 (3) ◽  
pp. R45-R64 ◽  
Author(s):  
E Kawamura ◽  
V Vahedi ◽  
M A Lieberman ◽  
C K Birdsall
Keyword(s):  
Energy Distributions ◽  
Ion Energy ◽  
Review Analysis ◽  
Ion Energy Distributions

scholarly journals Ponderomotive force and ion energy distributions in an rf sheath

1992 ◽  
Vol 68 (1) ◽  
pp. 44-47 ◽  
Author(s):  
S. Hamaguchi ◽  
R. T. Farouki ◽  
M. Dalvie
Keyword(s):  
Ponderomotive Force ◽  
Energy Distributions ◽  
Ion Energy ◽  
Ion Energy Distributions

The ion energy distributions and ion flux composition from a high power impulse magnetron sputtering discharge

2006 ◽  
Vol 515 (4) ◽  
pp. 1522-1526 ◽  
Author(s):  
J. Bohlmark ◽  
M. Lattemann ◽  
J.T. Gudmundsson ◽  
A.P. Ehiasarian ◽  
Y. Aranda Gonzalvo ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Ion Flux ◽  
Energy Distributions ◽  
Ion Energy ◽  
Flux Composition ◽  
Ion Energy Distributions
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