Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing

2021 ◽  
Vol 36 (11) ◽  
pp. 115006
Author(s):  
M M I Megat Hasnan ◽  
N Nayan ◽  
M K Ahmad ◽  
R Mohd Zin ◽  
S C Fhong ◽  
...  
Keyword(s):  
Semiconductor Fabrication

A scheduling rule for job release in semiconductor fabrication

1988 ◽  
Vol 7 (5) ◽  
pp. 213-217 ◽  
Author(s):  
C.Roger Glassey ◽  
Mauricio G.C. Resende
Keyword(s):  
Semiconductor Fabrication

Impact of integrating equipment health in production scheduling for semiconductor fabrication

2018 ◽  
Vol 120 ◽  
pp. 450-459 ◽  
Author(s):  
Yu-Ting Kao ◽  
Stéphane Dauzère-Pérès ◽  
Jakey Blue ◽  
Shi-Chung Chang
Keyword(s):  
Production Scheduling ◽  
Semiconductor Fabrication

Design and Validation of a Simulation-Based Modular Planning and Scheduling System of Semiconductor Fabrication Facilities

2011 ◽  
Vol 48-49 ◽  
pp. 378-381
Author(s):  
Li Li ◽  
Fei Qiao
Keyword(s):  
Simulation Modeling ◽  
General Structure ◽  
Structure Model ◽  
Planning And Scheduling ◽  
Scheduling System ◽  
Information Layer ◽  
Simulation Based ◽  
Semiconductor Fabrication ◽  
Control Modules

A simulation-based modular planning and scheduling system developed for semiconductor fabrication facilities (SFFs) is discussed. Firstly, the general structure model (GSM) for SFFs, composed of a configurable definition layer, a physical layer, a process information layer and a planning and scheduling layer, is proposed. Secondly, a data-based dynamic simulation modeling method is given. Thirdly, a simulation-based modular planning and scheduling system (SMPSS) for SFFs, including model modules, release control modules, scheduling modules and rescheduling modules, is designed and developed. Finally, a case study is used to demonstrate the effectiveness of

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