Enhancing the linear dynamic range of a mode-localized MEMS mass sensor with repulsive electrostatic actuation
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2018 ◽
Vol 67
(11)
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pp. 2684-2691
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2018 ◽
Vol 545
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pp. 30-33
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2020 ◽
Vol 32
(7)
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pp. 3219-3228
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2020 ◽
Vol 35
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pp. 84-99
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2015 ◽
Vol 15
(12)
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pp. 7081-7086
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